Structural design of a silicon micro-turbo-generator

被引:17
作者
Chen, KS
Spearing, SM
Nemeth, NN
机构
[1] Natl Cheng Kung Univ, Dept Mech Engn, Tainan 70001, Taiwan
[2] MIT, Dept Aeronaut & Astronaut, Cambridge, MA 02139 USA
[3] NASA, John H Glenn Res Ctr, Cleveland, OH 44135 USA
关键词
D O I
10.2514/2.1367
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
The probabilistic structural analysis and design of a silicon micro-turbo-generator rotor are presented, This rotor was designed to have a tip speed of 500 m/s. Three-dimensional finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of micro-turbine-generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the etching process achieving a high surface quality The overall approach and tests employed are equally applicable to other highly stressed microelectromechanical systems.
引用
收藏
页码:720 / 728
页数:9
相关论文
共 27 条
[1]   Characterization of a time multiplexed inductively coupled plasma etcher [J].
Ayón, AA ;
Braff, R ;
Lin, CC ;
Sawin, HH ;
Schmidt, MA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (01) :339-349
[2]  
BARNETT RL, 1967, AFDRLTR66220, P591
[3]  
BLEVINS RD, 1984, FORMULAS NATURAL FRE, P109
[4]   CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES [J].
BRANTLEY, WA .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) :534-535
[5]  
CHEN CP, 1980, AM CERAM SOC BULL, V59, P469
[6]   Controlling and testing the fracture strength of silicon on the mesoscale [J].
Chen, KS ;
Ayon, A ;
Spearing, SM .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2000, 83 (06) :1476-1484
[7]  
CHEN KS, 1998, THESIS MIT CAMBRIDGE, P76
[8]   Microengineering - Macro power from micro machinery [J].
Epstein, AH ;
Senturia, SD .
SCIENCE, 1997, 276 (5316) :1211-1211
[9]  
EPSTEIN AH, 1997, 971773 AIAA
[10]  
EPSTEIN AH, 1997, P INT C SOL STAT SEN, P753