Structural design of a silicon micro-turbo-generator

The probabilistic structural analysis and design of a silicon micro-turbo-generator rotor are presented, This rotor was designed to have a tip speed of 500 m/s. Three-dimensional finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of micro-turbine-generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the etching process achieving a high surface quality The overall approach and tests employed are equally applicable to other highly stressed microelectromechanical systems.