MEMS flow sensors for nano-fluidic applications

被引：146

作者：

Wu, SY ^{[1
]}

Lin, Q ^{[1
]}

Yuen, Y ^{[1
]}

Tai, YC ^{[1
]}

机构：

[1] CALTECH, Micromachining Lab, Pasadena, CA 91125 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 89卷 / 1-2期

关键词：

micro electro mechanical systems; nano-fluidic applications; micromachined thermal sensors;

D O I：

10.1016/S0924-4247(00)00541-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents micromachined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thin-film heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater's temperature coefficient of resistance within tolerable noise limits, and the microchannel is suspended from the substrate to improve thermal isolation. The sensors have demonstrated a flow rate resolution of 0.4 nl/min, as well as the capability for detecting micro bubbles in the liquid. Heat transfer simulation has also been performed to explain the sensor operation and yielded excellent agreement with experimental data. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：152 / 158

页数：7

共 8 条

[1] Thermal flow sensor for liquids and gases [J].

Ashauer, M ;

Glosch, H ;

Hedrich, F ;

Hey, N ;

Sandmaier, H ;

Lang, W .

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, :351-355

[2]

CASELLA G, 1990, STAT INFERENCE, P216

[3] MICRO-LIQUID FLOW SENSOR [J].

LAMMERINK, TSJ ;

TAS, NR ;

ELWENSPOEK, M ;

FLUITMAN, JHJ .

SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :45-50

[4] Modular concept for fluid handling systems - A demonstrator micro analysis system [J].

Lammerink, TSJ ;

Spiering, VL ;

Elwenspoek, M ;

Fluitman, JHJ ;

vandenBerg, A .

NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, :389-394

[5]

RITCHER M, 1999, P INT C MICR EL MECH, P118

[6]

WANG XQ, 1997, P INT C SOL STAT SEN, P1505

[7]

White F.M., 2016, FLUID MECH-SOV RES, V8th

[8] A suspended microchannel with integrated temperature sensors for high-pressure flow studies [J].

Wu, S ;

Mai, J ;

Zohar, Y ;

Tai, YC ;

Ho, CM .

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, :87-92

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