Continuous roll-to-roll growth of graphene films by chemical vapor deposition

被引：95

作者：

Hesjedal, Thorsten ^{[1
,2
]}

机构：

[1] Univ Waterloo, Dept Elect & Comp Engn, Giga To Nanoelect Ctr, Waterloo, ON N2L 3G1, Canada

[2] Univ Oxford, Dept Phys, Clarendon Lab, Oxford OX1 3PU, England

来源：

APPLIED PHYSICS LETTERS | 2011年 / 98卷 / 13期

基金：

加拿大自然科学与工程研究理事会;

关键词：

FEW-LAYER GRAPHENE; LARGE-AREA; GRAPHITE; CARBON; OXIDE; REDUCTION;

D O I：

10.1063/1.3573866

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Few-layer graphene is obtained in atmospheric chemical vapor deposition on polycrystalline copper in a roll-to-roll process. Raman and x-ray photoelectron spectroscopy were employed to confirm the few-layer nature of the graphene film, to map the inhomogeneities, and to study and optimize the growth process. This continuous growth process can be easily scaled up and enables the low-cost fabrication of graphene films for industrial applications. (C) 2011 American Institute of Physics. [doi:10.1063/1.3573866]

引用

页数：3

共 30 条

[1] Bae S, 2010, NAT NANOTECHNOL, V5, P574, DOI [10.1038/nnano.2010.132, 10.1038/NNANO.2010.132]
[2] Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics
Berger, C
Song, ZM
Li, TB
Li, XB
Ogbazghi, AY
Feng, R
Dai, ZT
Marchenkov, AN
Conrad, EH
First, PN
de Heer, WA
[J]. JOURNAL OF PHYSICAL CHEMISTRY B, 2004, 108 (52) : 19912 - 19916
[3] Role of Kinetic Factors in Chemical Vapor Deposition Synthesis of Uniform Large Area Graphene Using Copper Catalyst
Bhaviripudi, Sreekar
Jia, Xiaoting
Dresselhaus, Mildred S.
Kong, Jing
[J]. NANO LETTERS, 2010, 10 (10) : 4128 - 4133
[4] Variable temperature Raman microscopy as a nanometrology tool for graphene layers and graphene-based devices
Calizo, I.
Miao, F.
Bao, W.
Lau, C. N.
Balandin, A. A.
[J]. APPLIED PHYSICS LETTERS, 2007, 91 (07)
[5] REDUCTION OF COPPER OXIDES BY UV-RADIATION AND ATOMIC-HYDROGEN STUDIED BY XPS
FLEISCH, TH
MAINS, GJ
[J]. APPLIED SURFACE SCIENCE, 1982, 10 (01) : 51 - 62
[6] Atomic structure of monolayer graphite formed on Ni(111)
Gamo, Y
Nagashima, A
Wakabayashi, M
Terai, M
Oshima, C
[J]. SURFACE SCIENCE, 1997, 374 (1-3) : 61 - 64
[7] Epitaxial Graphene on Cu(111)
Gao, Li
Guest, Jeffrey R.
Guisinger, Nathan P.
[J]. NANO LETTERS, 2010, 10 (09) : 3512 - 3516
[8] Spatially resolved raman spectroscopy of single- and few-layer graphene
Graf, D.
Molitor, F.
Ensslin, K.
Stampfer, C.
Jungen, A.
Hierold, C.
Wirtz, L.
[J]. NANO LETTERS, 2007, 7 (02) : 238 - 242
[9] Direct Chemical Vapor Deposition of Graphene on Dielectric Surfaces
Ismach, Ariel
Druzgalski, Clara
Penwell, Samuel
Schwartzberg, Adam
Zheng, Maxwell
Javey, Ali
Bokor, Jeffrey
Zhang, Yuegang
[J]. NANO LETTERS, 2010, 10 (05) : 1542 - 1548
[10] Flexible electronics and displays: High-resolution, roll-to-roll, projection lithography and photoablation processing technologies for high-throughput production
Jain, K
Klosner, M
Zemel, M
Raghunandan, S
[J]. PROCEEDINGS OF THE IEEE, 2005, 93 (08) : 1500 - 1510

← 1 2 3 →