Continuous roll-to-roll growth of graphene films by chemical vapor deposition

被引:95
作者
Hesjedal, Thorsten [1 ,2 ]
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Giga To Nanoelect Ctr, Waterloo, ON N2L 3G1, Canada
[2] Univ Oxford, Dept Phys, Clarendon Lab, Oxford OX1 3PU, England
基金
加拿大自然科学与工程研究理事会;
关键词
FEW-LAYER GRAPHENE; LARGE-AREA; GRAPHITE; CARBON; OXIDE; REDUCTION;
D O I
10.1063/1.3573866
中图分类号
O59 [应用物理学];
学科分类号
摘要
Few-layer graphene is obtained in atmospheric chemical vapor deposition on polycrystalline copper in a roll-to-roll process. Raman and x-ray photoelectron spectroscopy were employed to confirm the few-layer nature of the graphene film, to map the inhomogeneities, and to study and optimize the growth process. This continuous growth process can be easily scaled up and enables the low-cost fabrication of graphene films for industrial applications. (C) 2011 American Institute of Physics. [doi:10.1063/1.3573866]
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页数:3
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