Graphene synthesis by chemical vapor deposition and transfer by a roll-to-roll process

被引:192
作者
Juang, Zhen-Yu [1 ]
Wu, Chih-Yu [1 ]
Lu, Ang-Yu [1 ]
Su, Ching-Yuan [1 ]
Leou, Keh-Chyang [1 ]
Chen, Fu-Rong [1 ]
Tsai, Chuen-Horng [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 30013, Taiwan
关键词
FEW-LAYER GRAPHENE; LARGE-AREA; RAMAN; FILMS; SUBSTRATE; DEVICES;
D O I
10.1016/j.carbon.2010.05.001
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We synthesized centimeter-scale single- to few-layer graphene (FLG) films via chemical vapor deposition (CVD) on Ni foils. We demonstrates that the precipitation mechanism may not be the only important mechanism in the formation of graphene by CVD in Ni system, and that controlling the cooling rate in the CVD process may not be the appropriate way to control the thickness of graphene films. In addition, we are the first to demonstrate the transfer of centimeter-scale FLG from Ni foil to transparent flexible polyethylene terephthalate substrates via an efficient roll-to-roll process. Comparing to rigid substrates, synthesis of graphene on flexible Ni foil has necessity for the use of a roll-to-roll transfer process. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:3169 / 3174
页数:6
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