Synthesis of Large-Area Graphene Layers on Poly-Nickel Substrate by Chemical Vapor Deposition: Wrinkle Formation

被引:858
作者
Chae, Seung Jin [2 ]
Guenes, Fethullah [2 ]
Kim, Ki Kang [2 ]
Kim, Eun Sung [2 ]
Han, Gang Hee [2 ]
Kim, Soo Min [2 ]
Shin, Hyeon-Jin [1 ,2 ]
Yoon, Seon-Mi [1 ]
Choi, Jae-Young [1 ]
Park, Min Ho [3 ]
Yang, Cheol Woong [3 ]
Pribat, Didier [4 ]
Lee, Young Hee [2 ]
机构
[1] Samsung Adv Inst Technol, Display Device & Proc Lab, Suwon 440600, South Korea
[2] Sungkyunkwan Univ, Sungkyunkwan Adv Inst Nanotechnol, Ctr Nanotubes & Nanostruct Composites, Phys Div BK21, Suwon 440746, South Korea
[3] Sungkyunkwan Univ, Dept Adv Mat Engn, Suwon 440746, South Korea
[4] Ecole Polytech, CNRS, UMR 7647, Phys Interfaces & Couches Minces Lab, F-91128 Palaiseau, France
关键词
CARBON NANOTUBES; SINGLE-LAYER; GRAPHITE; 6H-SIC(0001); PT(111);
D O I
10.1002/adma.200803016
中图分类号
O6 [化学];
学科分类号
070301 [无机化学];
摘要
Large-area, few-layer graphene is grown on a poly-nickel substrate using optimized CVD conditions. High temperature, short growth time, and an optimal gas mixing ratio (C2H2/H-2 = 2/45) are found to be necessary to synthesize highly crystalline few-layer grapheme, which may find applications in electronic devices. The wrinkles that are observed under all growth conditions are proposed to be formed by two processes.
引用
收藏
页码:2328 / +
页数:7
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