Evolution of sp2 networks with substrate temperature in amorphous carbon films:: Experiment and theory -: art. no. 014120

被引:63
作者
Gago, R
Vinnichenko, M
Jäger, HU
Belov, AY
Jiménez, I
Huang, N
Sun, H
Maitz, MF
机构
[1] Forschungszentrum Rossendorf, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
[2] Univ Autonoma Madrid, Ctr Microanal Mat, E-28049 Madrid, Spain
[3] Kyiv Taras Shevchenko Univ, Dept Phys, UA-01033 Kiev, Ukraine
[4] Tech Univ Dresden, D-01062 Dresden, Germany
[5] CSIC, Inst Ciencia & Tecnol Polimeros, Madrid, Spain
[6] SW Jiaotong Univ, Coll Mat Sci & Engn, Chengdu 610031, Peoples R China
[7] RAS, Inst Crystallog, Moscow, Russia
关键词
D O I
10.1103/PhysRevB.72.014120
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The evolution of sp(2) hybrids in amorphous carbon (a-C) films deposited at different substrate temperatures was studied experimentally and theoretically. The bonding structure of a-C films prepared by filtered cathodic vacuum arc was assessed by the combination of visible Raman spectroscopy, x-ray absorption, and spectroscopic ellipsometry, while a-C structures were generated by molecular-dynamics deposition simulations with the Brenner interatomic potential to determine theoretical sp(2) site distributions. The experimental results show a transition from tetrahedral a-C (ta-C) to sp(2)-rich structures at similar to 500 K. The sp(2) hybrids are mainly arranged in chains or pairs whereas graphitic structures are only promoted for sp(2) fractions above 80%. The theoretical analysis confirms the preferred pairing of isolated sp(2) sites in ta-C, the coalescence of sp(2) clusters for medium sp(2) fractions, and the pronounced formation of rings for sp(2) fractions > 80%. However, the dominance of sixfold rings is not reproduced theoretically, probably related to the functional form of the interatomic potential used.
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页数:9
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共 64 条
[1]  
BRENNER DW, 1992, PHYS REV B, V46, P1948, DOI 10.1103/PhysRevB.46.1948.2
[2]   EMPIRICAL POTENTIAL FOR HYDROCARBONS FOR USE IN SIMULATING THE CHEMICAL VAPOR-DEPOSITION OF DIAMOND FILMS [J].
BRENNER, DW .
PHYSICAL REVIEW B, 1990, 42 (15) :9458-9471
[3]   Evolution of sp2 bonding with deposition temperature in tetrahedral amorphous carbon studied by Raman spectroscopy [J].
Chhowalla, M ;
Ferrari, AC ;
Robertson, J ;
Amaratunga, GAJ .
APPLIED PHYSICS LETTERS, 2000, 76 (11) :1419-1421
[4]   Near-edge x-ray absorption of carbon materials for determining bond hybridization In mixed sp2/sp3 bonded materials [J].
Coffman, FL ;
Cao, R ;
Pianetta, PA ;
Kapoor, S ;
Kelly, M ;
Terminello, LJ .
APPLIED PHYSICS LETTERS, 1996, 69 (04) :568-570
[5]   SPUTTER DEPOSITION OF DENSE DIAMOND-LIKE CARBON-FILMS AT LOW-TEMPERATURE [J].
CUOMO, JJ ;
DOYLE, JP ;
BRULEY, J ;
LIU, JC .
APPLIED PHYSICS LETTERS, 1991, 58 (05) :466-468
[6]   Optical properties of graphite [J].
Djurisic, AB ;
Li, EH .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (10) :7404-7410
[7]   THEORY OF DIAMOND-LIKE AMORPHOUS-CARBON [J].
DRABOLD, DA ;
FEDDERS, PA ;
STUMM, P .
PHYSICAL REVIEW B, 1994, 49 (23) :16415-16422
[8]  
Egerton R. F., 2011, ELECT ENERGY LOSS SP, DOI DOI 10.1007/978-1-4419-9583-4
[9]   PROPERTIES OF FILTERED-ION-BEAM-DEPOSITED DIAMOND-LIKE CARBON AS A FUNCTION OF ION ENERGY [J].
FALLON, PJ ;
VEERASAMY, VS ;
DAVIS, CA ;
ROBERTSON, J ;
AMARATUNGA, GAJ ;
MILNE, WI ;
KOSKINEN, J .
PHYSICAL REVIEW B, 1993, 48 (07) :4777-4782
[10]   PROPERTIES OF FILTERED-ION-BEAM-DEPOSITED DIAMOND-LIKE CARBON AS A FUNCTION OF ION ENERGY (VOL 48, PG 4777, 1993) [J].
FALLON, PJ ;
VEERASAMY, VS ;
DAVIS, CA ;
ROBERTSON, J ;
AMARATUNGA, GAJ ;
MILNE, WI ;
KOSKINEN, J .
PHYSICAL REVIEW B, 1994, 49 (03) :2287-2287