Evolution of sp2 networks with substrate temperature in amorphous carbon films:: Experiment and theory -: art. no. 014120

被引:63
作者
Gago, R
Vinnichenko, M
Jäger, HU
Belov, AY
Jiménez, I
Huang, N
Sun, H
Maitz, MF
机构
[1] Forschungszentrum Rossendorf, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
[2] Univ Autonoma Madrid, Ctr Microanal Mat, E-28049 Madrid, Spain
[3] Kyiv Taras Shevchenko Univ, Dept Phys, UA-01033 Kiev, Ukraine
[4] Tech Univ Dresden, D-01062 Dresden, Germany
[5] CSIC, Inst Ciencia & Tecnol Polimeros, Madrid, Spain
[6] SW Jiaotong Univ, Coll Mat Sci & Engn, Chengdu 610031, Peoples R China
[7] RAS, Inst Crystallog, Moscow, Russia
关键词
D O I
10.1103/PhysRevB.72.014120
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The evolution of sp(2) hybrids in amorphous carbon (a-C) films deposited at different substrate temperatures was studied experimentally and theoretically. The bonding structure of a-C films prepared by filtered cathodic vacuum arc was assessed by the combination of visible Raman spectroscopy, x-ray absorption, and spectroscopic ellipsometry, while a-C structures were generated by molecular-dynamics deposition simulations with the Brenner interatomic potential to determine theoretical sp(2) site distributions. The experimental results show a transition from tetrahedral a-C (ta-C) to sp(2)-rich structures at similar to 500 K. The sp(2) hybrids are mainly arranged in chains or pairs whereas graphitic structures are only promoted for sp(2) fractions above 80%. The theoretical analysis confirms the preferred pairing of isolated sp(2) sites in ta-C, the coalescence of sp(2) clusters for medium sp(2) fractions, and the pronounced formation of rings for sp(2) fractions > 80%. However, the dominance of sixfold rings is not reproduced theoretically, probably related to the functional form of the interatomic potential used.
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页数:9
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