共 19 条
[3]
Chan C.-M., 1996, Surface Science Reports, V24, P1, DOI 10.1016/0167-5729(96)80003-3
[4]
Spectroscopic study of plasma using zirconium tetra-tert-butoxide for the plasma enhanced chemical vapor deposition of zirconium oxide
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2001, 19 (06)
:2751-2761
[10]
Inagaki N, 1997, J APPL POLYM SCI, V66, P77