Absorption of EUV in laser plasmas generated on xenon gas jets

被引:22
作者
de Bruijn, R
Koshelev, K
Kooijman, G
Toma, ES
Bijkerk, F
机构
[1] FOM, Inst Plasma Phys Rijnhuizen, NL-3430 BE Nieuwegein, Netherlands
[2] RAS, Inst Spect, Troitsk 142190, Moscow Region, Russia
关键词
laser produced plasma; EUV; gas jet; xenon;
D O I
10.1016/S0022-4073(03)00063-3
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Laser plasmas have been produced using a xenon gas jet as a target. Spectra in the range of 5-20 nm were recorded using a transmission grating spectrograph. A quantitative spectral analysis is given of the dependence of the EUV source brightness similar to 13.5 nm on two critical parameters, namely the initial target gas density and EUV absorption in the outermost, low-density target zone. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:97 / 105
页数:9
相关论文
共 7 条
[1]   Analysis of the 4p64d84f and 4p54d10 configurations of Xe X and some highly excited levels of XeVIII and XeIX ions [J].
Churilov, SS ;
Joshi, YN .
PHYSICA SCRIPTA, 2002, 65 (01) :40-45
[2]  
CHURILOV SS, COMMUNICATION
[3]   Characterization of a novel double-gas-jet laser-plasma EUV source [J].
de Bruijn, R ;
Bartnik, A ;
Fiedorowicz, H ;
Hegeman, P ;
Constantinescu, R ;
Bijkerk, F .
EMERGING LITHOGRAPHIC TECHNOLOGIES IV, 2000, 3997 :157-161
[4]   Characterization and optimization of a laser-produced x-ray source with a gas puff target [J].
Fiedorowicz, H ;
Bartnik, A ;
Jarocki, R ;
Rakowski, R ;
Szczurek, M ;
Daido, H ;
Sakaya, N ;
Suzuki, M ;
Nagatomo, H ;
Tang, HJ ;
Choi, IW ;
Tohayama, Y ;
Yamagami, S ;
Nakayama, T .
EUV, X-RAY, AND NEUTRON OPTICS AND SOURCES, 1999, 3767 :10-20
[5]   CD-I ISOELECTRONIC SEQUENCE - WAVELENGTHS AND ENERGY-LEVELS FOR XE-VII THROUGH EU-XVI [J].
KAUFMAN, V ;
SUGAR, J .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1987, 4 (12) :1919-1923
[6]   Portable diagnostics for EUV light sources [J].
Stuik, R ;
Constantinescu, R ;
Hegeman, P ;
Jonkers, J ;
Fledderus, HF ;
Banine, V ;
Bijkerk, F .
SOFT X-RAY AND EUV IMAGING SYSTEMS, 2000, 4146 :121-127
[7]   Initial results for an argon Z pinch using a double-shell gas puff [J].
Sze, H ;
Coleman, PL ;
Failor, BH ;
Fisher, A ;
Levine, JS ;
Song, Y ;
Waisman, EM ;
Apruzese, JP ;
Chong, YK ;
Davis, J ;
Cochran, FL ;
Thornhill, JW ;
Velikovich, AL ;
Weber, BV ;
Deeney, C ;
Coverdale, CA ;
Schneider, R .
PHYSICS OF PLASMAS, 2000, 7 (10) :4223-4226