Ultraviolet-assisted curing of polycrystalline pure-silica zeolites: Hydrophobization, functionalization, and cross-linking of grains

被引:35
作者
Eslava, Salvador
Iacopi, Francesca
Baklanov, Mikhail R.
Kirschhock, Christine E. A.
Maex, Karen
Martens, Johan A.
机构
[1] Interuniv Microelect Ctr, B-3001 Louvain, Belgium
[2] Katholieke Univ Leuven, Ctr Oppervlaktechem & Katal, B-3001 Louvain, Belgium
[3] Katholieke Univ Leuven, INSYS, ESAT, Dept Elect Engn, B-3001 Heverlee, Belgium
关键词
D O I
10.1021/ja0723737
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We demonstrate the advantageous use of an ultraviolet-assisted curing for the preparation of polycrystalline zeolites. The ultraviolet-assisted curing effectively hydrophobizes the porous structure of a spin-on Silicalite-1 film by means of silanol condensation and grafting of desorbing organic template fragments. Moreover, it enhances the packing of the grains, so the intergrain voids are substantially shrunk and the mechanical properties improved.
引用
收藏
页码:9288 / +
页数:3
相关论文
共 21 条
[1]   Quantification of processing damage in porous low dielectric constant films [J].
Baklanov, Mikhail R. ;
Mogilnikov, Konstantin P. ;
Le, Quoc Toan .
MICROELECTRONIC ENGINEERING, 2006, 83 (11-12) :2287-2291
[2]   Determination of pore size distribution in thin films by ellipsometric porosimetry [J].
Baklanov, MR ;
Mogilnikov, KP ;
Polovinkin, VG ;
Dultsev, FN .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03) :1385-1391
[3]   Separations using zeolite membranes [J].
Coronas, J ;
Santamaría, J .
SEPARATION AND PURIFICATION METHODS, 1999, 28 (02) :127-177
[4]   Surfactant removal and silica condensation during the photochemical calcination of thin film silica mesophases [J].
Dattelbaum, AM ;
Amweg, ML ;
Ruiz, JD ;
Ecke, LE ;
Shreve, AP ;
Parikh, AN .
JOURNAL OF PHYSICAL CHEMISTRY B, 2005, 109 (30) :14551-14556
[5]   Preferred growth of siliceous MEL zeolite film on silicon wafer [J].
Dong, JP ;
Xu, YJ ;
Long, YC .
MICROPOROUS AND MESOPOROUS MATERIALS, 2005, 87 (01) :59-66
[6]  
Eslava-Fernandez S, 2006, MATER RES SOC SYMP P, V914, P421
[7]   CALCINATION OF LARGE MFI-TYPE SINGLE-CRYSTALS .2. CRACK FORMATION AND THERMOMECHANICAL PROPERTIES IN VIEW OF THE PREPARATION OF ZEOLITE MEMBRANES [J].
GEUS, ER ;
VANBEKKUM, H .
ZEOLITES, 1995, 15 (04) :333-341
[8]   Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization [J].
Grill, A ;
Neumayer, DA .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (10) :6697-6707
[9]   Thermomechanical properties of thin organosilicate glass films treated with ultraviolet-assisted cure [J].
Iacopi, F. ;
Beyer, G. ;
Travaly, Y. ;
Waldfried, C. ;
Gage, D. M. ;
Dauskardt, R. H. ;
Houthoofd, K. ;
Jacobs, P. ;
Adriaensens, P. ;
Schulze, K. ;
Schulz, S. E. ;
List, S. ;
Carlotti, G. .
ACTA MATERIALIA, 2007, 55 (04) :1407-1414
[10]   Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation [J].
Iacopi, F ;
Travaly, Y ;
Eyckens, B ;
Waldfried, C ;
Abell, T ;
Guyer, EP ;
Gage, DM ;
Dauskardt, RH ;
Sajavaara, T ;
Houthoofd, K ;
Grobet, P ;
Jacobs, P ;
Maex, K .
JOURNAL OF APPLIED PHYSICS, 2006, 99 (05)