Electrodes for microfluidic devices produced by laser induced forward transfer

被引:25
作者
Germain, Chris
Charron, Luc
Lilge, Lothar
Tsui, Ying Y. [1 ]
机构
[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada
[2] Univ Toronto, Dept Med Biophys, Toronto, ON M5S 1A1, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
laser; laser induced forward transfer (LIFT); micropatterning; microfluidic devices; METAL-DEPOSITION; EXPANSION; PULSES; PLASMA;
D O I
10.1016/j.apsusc.2007.02.158
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The laser induced forward transfer (LIFT) process was used to create conductive lines and pads for rapid prototyping and repairing microdevices. Single 0.1-10 mu J pulses from a 120 fs 800 nm titanium: sapphire laser were used to transfer films consisting of 40-80 nmthickgold to create the lines. Experiments were conducted in air ambient. The laser was focused using 4 x and 10 x microscope objectives and produced 520 mu m diameter metal spots which were overlapped to produce conductive lines. Electrodes with widths between 10 and 50 mu m have been produced and their resistances have been measured. The resistivities of these LIFT produced An electrodes were found to be approximately (1-4) x 10(-6) Omega m m. It has also been shown that the conductivity of the lines can be further improved by electrical curing. The LIFT process was used to repair heaters for microfluidic applications and preliminarily create electrodes for control of electro-osmotic flow in microfluidic devices. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:8328 / 8333
页数:6
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