Epitaxial silicon carbide for X-ray detection

被引:62
作者
Bertuccio, G [1 ]
Casiraghi, R
Nava, F
机构
[1] Politecn Milan, Dipartimento Elettr & Informaz, I-20133 Milan, Italy
[2] Univ Modena, Dipartimento Fis, I-41100 Modena, Italy
关键词
Schottky diodes; semiconductor radiation detector; silicon carbide; X-ray detectors;
D O I
10.1109/23.915369
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present the first experimental results of X-ray detection and spectroscopy by means of Schottky junctions on epitaxial silicon carbide (SLC). The devices have a junction area of 3 mm(2) on an n-type 4H-SiC layer 30 mum thick with a dopant concentration of 1.8 X 10(15)cm(-3) At 300K, the reverse current density of the best device varies between 2 pA/cm(2) and 18 pA/cm(2) as the mean electric field is increased from 40 kY/cm up to 170 kV/cm. The devices have been tested with X and gamma raysfrom Am-241; the best measured energy resolution is 2.7 keV FWHM at room temperature.
引用
收藏
页码:232 / 233
页数:2
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