A low-voltage actuated micromachined microwave switch using torsion springs and leverage

被引：79

作者：

Hah, D ^{[1
]}

Yoon, E ^{[1
]}

Hong, S ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn & Comp Sci, Taejon 305338, South Korea

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 2000年 / 48卷 / 12期

关键词：

microactuators; micromachining; microwave switches;

D O I：

10.1109/22.899010

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a push-pull type microwave switch is proposed, which utilizes torsion springs and leverage for low-voltage operation. The switching operation up to 4 GHz is demonstrated. The actuation voltage is similar to5 V. The insertion loss of similar to1 dB and the isolation as high as similar to 40 dB at 1 GHz are achieved by the push-pull operation.

引用

页码：2540 / 2545

页数：6

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