Structural characterisation of B4C films deposited by laser-assisted CVD

被引：45

作者：

Oliveira, JC

Oliveira, MN

Conde, O

机构：

[1] Department of Physics, University of Lisbon, Ed. C1

来源：

SURFACE & COATINGS TECHNOLOGY | 1996年 / 80卷 / 1-2期

关键词：

boron carbide; laser chemical vapour deposition; Raman microprobe; boron-carbon coatings;

D O I：

10.1016/0257-8972(95)02602-9

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Boron carbide (B4C) coatings were deposited on fused silica substrates by LCVD with a CO2 laser. A reaction gas mixture of BCl3, CH4 and H-2 was used. The coatings were characterised by glancing incidence X-ray diffraction, Raman microprobe spectroscopy and electron probe microanalysis. The influence of gas-phase composition and laser parameters on the phase and chemical composition of the deposits were investigated.

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页码：100 / 104

页数：5

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