Capacitance engineering for InP-based heterostructure barrier varactor

被引:19
作者
Lheurette, E [1 ]
Melique, X [1 ]
Mounaix, P [1 ]
Mollot, F [1 ]
Vanbesien, O [1 ]
Lippens, D [1 ]
机构
[1] Univ Sci & Tech Lille Flandres Artois, UMR CNRS 9929, Inst Elect & Microelect Nord, F-59652 Villeneuve Dascq, France
关键词
D O I
10.1109/55.709634
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We investigate new schemes of M-based heterostructure barrier varactors with the aim of enhancing the capacitance nonlinearity of the devices. Starting from a generic steplike InGaAs/LnAlAs/AlAs single barrier heterostructure, planar-doped and buried InAs quantum-well barrier heterostructures were successfully fabricated. It is shown that both solutions lead to more efficient screening of electric field near equilibrium and hence to improvement in the capacitance-voltage ratios with values as high as similar to 7:1. Under bias, the capacitance modulation is governed by an escaping mechanism in contrast to the conventional depletion operation mode observed for conventional varactors.
引用
收藏
页码:338 / 340
页数:3
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