Atomistic simulations of the implantation of low-energy boron and nitrogen ions into graphene

被引:129
作者
Ahlgren, E. H. [1 ]
Kotakoski, J. [1 ]
Krasheninnikov, A. V. [1 ,2 ]
机构
[1] Univ Helsinki, Dept Phys, FIN-00014 Helsinki, Finland
[2] Aalto Univ, Dept Appl Phys, FIN-00076 Helsinki, Finland
基金
芬兰科学院;
关键词
CHEMICAL-VAPOR-DEPOSITION; ELECTRONIC-PROPERTIES; DOPED GRAPHENE; CARBON; FILMS; TRANSISTORS;
D O I
10.1103/PhysRevB.83.115424
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
By combining classical molecular dynamics simulations and density-functional-theory total-energy calculations, we study the possibility of doping graphene with B and N atoms using low-energy ion irradiation. Our simulations show that the optimum irradiation energy is 50 eV with substitution probabilities of 55% for N and 40% for B. We further estimate probabilities for different defect configurations to appear under B and N ion irradiation. We analyze the processes responsible for defect production and report an effective swift chemical sputtering mechanism for N irradiation at low energies (similar to 125 eV), which leads to production of single vacancies. Our results show that ion irradiation is a promising method for creating hybrid C-B/N structures for future applications in the realm of nanoelectronics.
引用
收藏
页数:7
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