High speed fabrication of aluminum nanostructures with 10 nm spatial resolution by electrochemical replication

被引：4

作者：

Biring, Sajal ^{[1
,2
]}

Tsai, Kun-Tong ^{[1
]}

Sur, Ujjal Kumar ^{[1
]}

Wang, Yuh-Lin ^{[1
,3
]}

机构：

[1] Acad Sinica, Inst Atom & Mol Sci, Taipei 10617, Taiwan

[2] Natl Tsing Hua Univ, Dept Chem, Taiwan Int Grad Program, Hsinchu, Taiwan

[3] Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan

来源：

NANOTECHNOLOGY | 2008年 / 19卷 / 35期

关键词：

D O I：

10.1088/0957-4484/19/35/355302

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A high fidelity electrochemical replication technique for the rapid fabrication of Al nanostructures with 10 nm lateral resolution has been successfully demonstrated. Aluminum is electrodeposited onto a lithographically patterned Si master using a non-aqueous organic hydride bath of aluminum chloride and lithium aluminum hydride at room temperature. Chemical pretreatment of the Si surface allows a clean detachment of the replicated Al foil from the master, permitting its repetitive use for mass replication. This high throughput technique opens up new possibilities in the fabrication of Al-related nanostructures, including the growth of long range ordered anodic alumina nanochannel arrays.

引用

页数：4

共 15 条

[1] Fabrication of ideally ordered anodic porous alumina with 63 nm hole periodicity using sulfuric acid [J].

Asoh, H ;

Nishio, K ;

Nakao, M ;

Yokoo, A ;

Tamamura, T ;

Masuda, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (02) :569-572

[2] Electrochemically replicated smooth aluminum foils for anodic alumina nanochannel arrays [J].

Biring, Sajal ;

Tsai, Kun-Tong ;

Sur, Ujjal Kumar ;

Wang, Yuh-Lin .

NANOTECHNOLOGY, 2008, 19 (01)

[3] Uses of electroplated aluminum for the development of microstructures and micromachining processes [J].

Frazier, AB ;

Allen, MG .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (02) :91-98

[4]

HARDING WB, 1974, MODERN ELECTROPLATIN, P63

[5] Ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces [J].

Liu, CY ;

Datta, A ;

Wang, YL .

APPLIED PHYSICS LETTERS, 2001, 78 (01) :120-122

[6] Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask [J].

Masuda, H ;

Satoh, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (1B) :L126-L129

[7] Highly ordered nanochannel-array architecture in anodic alumina [J].

Masuda, H ;

Yamada, H ;

Satoh, M ;

Asoh, H ;

Nakao, M ;

Tamamura, T .

APPLIED PHYSICS LETTERS, 1997, 71 (19) :2770-2772

[8] Highly ordered anodic porous alumina with 13-nm hole intervals using a 2D array of monodisperse nanoparticles as a template [J].

Matsui, Y ;

Nishio, K ;

Masuda, H .

SMALL, 2006, 2 (04) :522-525

[9] Fabrication of ideally ordered anodic porous alumina with large area by vacuum deposition of Al onto mold [J].

Nishio, Kazuyuki ;

Yanagishita, Takashi ;

Hatakeyama, Sho ;

Maegawa, Hiroaki ;

Masuda, Hideki .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (01) :L10-L12

[10] Detecting dynamic signals of ideally ordered nanohole patterned disk media fabricated using nanoimprint lithography [J].

Oshima, Hirotaka ;

Kikuchi, Hideyuki ;

Nakao, Hiroshi ;

Itoh, Ken-ichi ;

Kamimura, Takuya ;

Morikawa, Takeshi ;

Matsumoto, Koji ;

Umada, Takahiro ;

Tamura, Hiroaki ;

Nishio, Kazuyuki ;

Masuda, Hideki .

APPLIED PHYSICS LETTERS, 2007, 91 (02)

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