The effect of postdeposition annealing on chemical bonding in amorphous carbon nitride films prepared by dc magnetron sputtering

被引：13

作者：

Jiang, LD ^{[1
]}

Fitzgerald, AG ^{[1
]}

Rose, MJ ^{[1
]}

机构：

[1] Univ Dundee, Dept Elect Engn & Phys, Carnegie Lab Phys, Dundee DD1 4HN, Scotland

来源：

APPLIED SURFACE SCIENCE | 2001年 / 181卷 / 3-4期

关键词：

carbon nitride; thermal annealing; XPS;

D O I：

10.1016/S0169-4332(01)00427-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The effects of thermal annealing on the surface morphology, composition and chemical bond structure of amorphous carbon nitride (a-CN) films deposited by de magnetron sputtering are reported. Atomic force microscopy (AFM) results show that thermal annealing can gradually change the surface structure of the films from a cauliflower-like texture eventually to a uniform granular texture. Fourier transform infrared absorption (FTIR) spectroscopy and X-ray photoelectron spectroscopy (XPS) have been used to characterise. the change of chemical bonding induced by annealing. By detailed analysis of both C Is and N Is photoelectron spectra, we have found that annealing can break the C-N bonds in the films and that the graphite-like C-N bonds are relatively more stable with the increase of anneal temperature. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：331 / 338

页数：8

共 30 条

[11] SYMMETRY-BREAKING IN NITROGEN-DOPED AMORPHOUS-CARBON - INFRARED OBSERVATION OF THE RAMAN-ACTIVE G-BANDS AND D-BANDS [J].

KAUFMAN, JH ;

METIN, S ;

SAPERSTEIN, DD .

PHYSICAL REVIEW B, 1989, 39 (18) :13053-13060

[12] Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films [J].

Kulisch, W ;

Popov, C ;

Zambov, L ;

Bulir, J ;

Delplancke-Ogletree, MP ;

Lancok, J ;

Jelínek, M .

THIN SOLID FILMS, 2000, 377 :148-155

[13] Hardness and modulus properties in ion-beam-modified amorphous carbon: Temperature and dose rate dependences [J].

Lee, DH ;

Lee, H ;

Park, B .

JOURNAL OF MATERIALS RESEARCH, 1997, 12 (08) :2057-2063

[14] IONIZED MAGNETRON SPUTTER-DEPOSITION OF AMORPHOUS-CARBON NITRIDE THIN-FILMS [J].

LI, D ;

LOPEZ, S ;

CHUNG, YW ;

WONG, MS ;

SPROUL, WD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (03) :1063-1066

[15]

Lifshitz Y, 1997, P INT SCH PHYS, V135, P209

[16] PREDICTION OF NEW LOW COMPRESSIBILITY SOLIDS [J].

LIU, AY ;

COHEN, ML .

SCIENCE, 1989, 245 (4920) :841-842

[17] CARBON NITRIDE DEPOSITED USING ENERGETIC SPECIES - A 2-PHASE SYSTEM [J].

MARTON, D ;

BOYD, KJ ;

ALBAYATI, AH ;

TODOROV, SS ;

RABALAIS, JW .

PHYSICAL REVIEW LETTERS, 1994, 73 (01) :118-121

[18] The effect of annealing on the structure of cathodic are deposited amorphous carbon nitride films [J].

McCulloch, DG ;

Merchant, AR .

THIN SOLID FILMS, 1996, 290 :99-102

[19] COMPUTER-AIDED QUANTIFICATION OF AES AND XPS SPECTRA [J].

MOIR, PA ;

FITZGERALD, AG ;

STOREY, BE .

SURFACE AND INTERFACE ANALYSIS, 1989, 14 (6-7) :295-301

[20] EXPERIMENTAL REALIZATION OF THE COVALENT SOLID CARBON NITRIDE [J].

NIU, CM ;

LU, YZ ;

LIEBER, CM .

SCIENCE, 1993, 261 (5119) :334-337

← 1 2 3 →