Hard x-ray nanoprobe based on refractive x-ray lenses -: art. no. 124103

被引:300
作者
Schroer, CG
Kurapova, O
Patommel, J
Boye, P
Feldkamp, J
Lengeler, B
Burghammer, M
Riekel, C
Vincze, L
van der Hart, A
Küchler, M
机构
[1] HASYLAB, D-22607 Hamburg, Germany
[2] Univ Aachen, Inst Phys 2, D-52056 Aachen, Germany
[3] European Synchrotron Radiat Facil, F-38043 Grenoble, France
[4] State Univ Ghent, Dept Analyt Chem, B-9000 Ghent, Belgium
[5] Forschungszentrum Julich, ISG, D-52425 Julich, Germany
[6] Fraunhofer IZM, Dept Microdevices & Equipment, D-09126 Chemnitz, Germany
关键词
D O I
10.1063/1.2053350
中图分类号
O59 [应用物理学];
学科分类号
摘要
Based on nanofocusing refractive x-ray lenses a hard x-ray scanning microscope is currently being developed and is being implemented at beamline ID13 of the European Synchrotron Radiation Facility (Grenoble, France). It can be operated in transmission, fluorescence, and diffraction mode. Tomographic scanning allows one to determine the inner structure of a specimen. In this device, a monochromatic (E=21 keV) hard x-ray nanobeam with a lateral extension of 47x55 nm(2) was generated. Further reduction of the beam size to below 20 nm is targeted. (c) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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