Ultrahigh-density nanowire arrays grown in self-assembled diblock copolymer templates

被引:1948
作者
Thurn-Albrecht, T
Schotter, J
Kästle, CA
Emley, N
Shibauchi, T
Krusin-Elbaum, L
Guarini, K
Black, CT
Tuominen, MT
Russell, TP [1 ]
机构
[1] Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
[2] Univ Massachusetts, Dept Phys, Amherst, MA 01003 USA
[3] IBM Corp, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA
[4] Univ Calif Los Alamos Natl Lab, Los Alamos, NM 87545 USA
关键词
D O I
10.1126/science.290.5499.2126
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
We show a simple, robust, chemical route to the fabrication of ultrahigh-density arrays of nanopores with high aspect ratios using the equilibrium self-assembled morphology of asymmetric diblock copolymers. The dimensions and Lateral density of the array are determined by segmental interactions and the copolymer molecular weight. Through direct current electrodeposition, we fabricated vertical arrays of nanowires with densities in excess of 1.9 x 10(11) wires per square centimeter. We found markedly enhanced coercivities with ferromagnetic cobalt nanowires that point toward a route to ultrahigh-density storage media. The copolymer approach described is practical, parallel, compatible with current Lithographic processes, and amenable to multilayered device fabrication.
引用
收藏
页码:2126 / 2129
页数:4
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