In situ sensor of spatially resolved optical emission

被引：4

作者：

Buie, MJ ^{[1
]}

Pender, JTP ^{[1
]}

Holloway, JP ^{[1
]}

Brake, ML ^{[1
]}

机构：

[1] UNIV MICHIGAN,DEPT NUCL ENGN,ANN ARBOR,MI 48109

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1996年 / 24卷 / 01期

关键词：

D O I：

10.1109/27.491737

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An experimental study of the uniformity of the plasma emission from the gaseous electronics conference reference cell was conducted using a diagnositic technique refined at the University of Michigan known as spatially resolved optical emission spectroscopy (SR-OES). This diagnostic will provide immediate spatially resolved feedback regarding the plasma species emissivity.

引用

收藏

页码：111 / 112

页数：2

相关论文

共 9 条

[1]

BUIE MJ, 1993, MICROELECTRONICS PRO, V2091, P211

[2]

BUIE MJ, 1995, IN PRESS J QUANT SPE

[3] SELF-CONSISTENT FLUID MODELING OF RADIO-FREQUENCY DISCHARGES IN 2 DIMENSIONS [J].

DALVIE, M ;

SURENDRA, M ;

SELWYN, GS .

APPLIED PHYSICS LETTERS, 1993, 62 (24) :3207-3209

[4] ABSOLUTE SPATIALLY-RESOLVED AND TEMPORALLY-RESOLVED OPTICAL-EMISSION MEASUREMENTS OF RF GLOW-DISCHARGES IN ARGON [J].

DJUROVIC, S ;

ROBERTS, JR ;

SOBOLEWSKI, MA ;

OLTHOFF, JK .

JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1993, 98 (02) :159-180

[5] THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES [J].

HARGIS, PJ ;

GREENBERG, KE ;

MILLER, PA ;

GERARDO, JB ;

TORCZYNSKI, JR ;

RILEY, ME ;

HEBNER, GA ;

ROBERTS, JR ;

OLTHOFF, JK ;

WHETSTONE, JR ;

VANBRUNT, RJ ;

SOBOLEWSKI, MA ;

ANDERSON, HM ;

SPLICHAL, MP ;

MOCK, JL ;

BLETZINGER, P ;

GARSCADDEN, A ;

GOTTSCHO, RA ;

SELWYN, G ;

DALVIE, M ;

HEIDENREICH, JE ;

BUTTERBAUGH, JW ;

BRAKE, ML ;

PASSOW, ML ;

PENDER, J ;

LUJAN, A ;

ELTA, ME ;

GRAVES, DB ;

SAWIN, HH ;

KUSHNER, MJ ;

VERDEYEN, JT ;

HORWATH, R ;

TURNER, TR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (01) :140-154

[6] SPATIAL VARIATIONS IN THE CHARGE-DENSITY OF ARGON DISCHARGES IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE REACTOR [J].

OVERZET, LJ ;

HOPKINS, MB .

APPLIED PHYSICS LETTERS, 1993, 63 (18) :2484-2486

[7] COMPARISON OF ELECTRON-DENSITY MEASUREMENTS MADE USING A LANGMUIR PROBE AND MICROWAVE INTERFEROMETER IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE REACTOR [J].

OVERZET, LJ ;

HOPKINS, MB .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (07) :4323-4330

[8] RADIAL OPTICAL-EMISSION PROFILES OF RADIO-FREQUENCY GLOW-DISCHARGES [J].

PENDER, J ;

BUIE, M ;

VINCENT, T ;

HOLLOWAY, J ;

ELTA, M ;

BRAKE, ML .

JOURNAL OF APPLIED PHYSICS, 1993, 74 (05) :3590-3592

[9]

ROBERTS JR, 1991, AIP C P 257 AT PROC