Energy dependence of ion-induced sputtering yields from monatomic solids at normal incidence

The ion-induced sputtering yields from monatomic solids at normal incidence are presented graphically for various ion-target combinations as a function of the incident ion energy. To supplement the experimental data, sputtering yields are calculated by the Monte Carlo simulation code ACAT for some ion-target combinations. Each graph shows the available experimental and ACAT data points, together with the sputtering yields calculated by an empirical formula whose parameters are determined from the best fit to available data. (C) 1996 Academic Press, Inc.