MEMS-Actuated microdisk resonators with variable power coupling ratios

被引：66

作者：

Lee, MCM ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 05期

关键词：

microdisks; microelectromechanical devices; microresonators; optical resonators;

D O I：

10.1109/LPT.2005.845772

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel tunable microdisk resonator with microelectromechanical-system (MEMS)-actuated deformable waveguides is demonstrated for the first time. The deformable waveguide enables us to continuously vary the power coupling ratio of the microdisks. A laterally coupled device with a quality factor of 7700 is fabricated on silicon-on-insulator substrate. An optical notch filter with variable attenuation at the resonant wavelength is successfully demonstrated, with an extinction ratio of 9 dB. The MEMS-actuated tunable microdisk is a basic building block for many dynamic wavelength-division-multiplexing circuits.

引用

页码：1034 / 1036

页数：3

共 12 条

[1] Ultra-high-Q toroid microcavity on a chip [J].

Armani, DK ;

Kippenberg, TJ ;

Spillane, SM ;

Vahala, KJ .

NATURE, 2003, 421 (6926) :925-928

[2] Vertically coupled InP microdisk switching devices with electroabsorptive active regions [J].

Djordjev, K ;

Choi, SJ ;

Dapkus, PD .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2002, 14 (08) :1115-1117

[3] Microdisk tunable resonant filters and switches [J].

Djordjev, K ;

Choi, SJ ;

Dapkus, PD .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2002, 14 (06) :828-830

[4]

GREEN WMJ, 2003, IEEE LEOS ANN M C P, V1, P130

[5] Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction [J].

Lee, KK ;

Lim, DR ;

Kimerling, LC ;

Shin, J ;

Cerrina, F .

OPTICS LETTERS, 2001, 26 (23) :1888-1890

[6] A MEMS-actuated tunable microdisk resonator [J].

Lee, MCM ;

Wu, MC .

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2003, :28-29

[7] Optical delay lines based on optical filters [J].

Lenz, G ;

Eggleton, BJ ;

Madsen, CK ;

Slusher, RE .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 2001, 37 (04) :525-532

[8] Microring resonator channel dropping filters [J].

Little, BE ;

Chu, ST ;

Haus, HA ;

Foresi, J ;

Laine, JP .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1997, 15 (06) :998-1005

[9] Very high-order microring resonator filters for WDM applications [J].

Little, BE ;

Chu, ST ;

Absil, PP ;

Hryniewicz, JV ;

Johnson, FG ;

Seiferth, E ;

Gill, D ;

Van, V ;

King, O ;

Trakalo, M .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (10) :2263-2265

[10] Microring resonator arrays for VLSI photonics [J].

Little, BE ;

Chu, ST ;

Pan, W ;

Kokubun, Y .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2000, 12 (03) :323-325

← 1 2 →