Optical and structural property change by the thermal decomposition of amorphous platinum oxide film

被引:30
作者
Shima, T [1 ]
Tominaga, J [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, AIST, Ctr Appl Near Field Opt Res, Tsukuba, Ibaraki 3058562, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 6A期
关键词
amorphous platinum oxide; thermal decomposition; super-RENS; refractive index; platinum particles;
D O I
10.1143/JJAP.42.3479
中图分类号
O59 [应用物理学];
学科分类号
摘要
Refractive indices of amorphous platinum oxide film (a-PtO1.1 and a-PtO1.6) at the wavelength of 400 nm and 630 nm are evaluated. A transmittance measurement obtained during heating the film demonstrated an optical property change at 550-600degreesC. X-ray diffraction and Raman scattering measurements confirmed that the change derives from the thermal decomposition of PtOx. Furthermore, Pt particles (diameter: 20-30 nm) are formed when thin PtOx film (thickness: about 4 nm) is thermally decomposed.
引用
收藏
页码:3479 / 3480
页数:2
相关论文
共 10 条
[1]   Preparation of oxygen-containing Pt and Pt oxide thin films by reactive sputtering and their characterization [J].
Abe, Y ;
Yanagisawa, H ;
Sasaki, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (08) :4482-4486
[2]   OPTICAL BEHAVIOR OF SPUTTER-DEPOSITED PLATINUM-OXIDE FILMS [J].
AITA, CR .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (08) :3169-3173
[3]   Rigid bubble pit formation and huge signal enhancement in super-resolution near-field structure disk with platinum-oxide layer [J].
Kikukawa, T ;
Nakano, T ;
Shima, T ;
Tominaga, J .
APPLIED PHYSICS LETTERS, 2002, 81 (25) :4697-4699
[4]  
Lide D. R., 1997, CRC HDB CHEM PHYSICS
[5]   Focused-ion-beam writing of electrical connections into platinum oxide films [J].
Machalett, F ;
Edinger, K ;
Ye, L ;
Melngailis, J ;
Venkatesan, T ;
Diegel, M ;
Steenbeck, K .
APPLIED PHYSICS LETTERS, 2000, 76 (23) :3445-3447
[6]   GROWTH AND CHARACTERIZATION OF REACTIVELY SPUTTERED THIN-FILM PLATINUM OXIDES [J].
MCBRIDE, JR ;
GRAHAM, GW ;
PETERS, CR ;
WEBER, WH .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (03) :1596-1604
[7]   Structural, optical, and electronic properties of magnetron-sputtered platinum oxide films [J].
Neff, H ;
Henkel, S ;
Hartmannsgruber, E ;
Steinbeiss, E ;
Michalke, W ;
Steenbeck, K ;
Schmidt, HG .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) :7672-7675
[8]   Thermal stability and oxygen-loss characteristics of Pt(O) films prepared by reactive sputtering [J].
Saenger, KL ;
Cabral, C ;
Lavoie, C ;
Rossnagel, SM .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (11) :6084-6087
[9]   Optical transmittance study of the thermal decomposition of sputtered Pt-Ag-O films [J].
Shima, T ;
Tominaga, J .
THIN SOLID FILMS, 2003, 425 (1-2) :31-34
[10]   An approach for recording and readout beyond the diffraction limit with an Sb thin film [J].
Tominaga, J ;
Nakano, T ;
Atoda, N .
APPLIED PHYSICS LETTERS, 1998, 73 (15) :2078-2080