Thermal expansion coefficient of hydrogenated amorphous carbon

被引：89

作者：

Marques, FC ^{[1
]}

Lacerda, RG

Champi, A

Stolojan, V

Cox, DC

Silva, SRP

机构：

[1] Univ Estadual Campinas, Inst Fis Gleb Wataghin, BR-13083970 Campinas, SP, Brazil

[2] Univ Surrey, Sch Elect & Phys Sci, Guildford GU2 7XH, Surrey, England

来源：

APPLIED PHYSICS LETTERS | 2003年 / 83卷 / 15期

关键词：

D O I：

10.1063/1.1619557

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The coefficient of thermal expansion (CTE) of hydrogenated amorphous carbon (a-C:H) was investigated as a function of the concentration of sp(2) hybridization. The CTE, determined using the thermally induced bending technique, depends on the concentration of sp(2) bonded carbon, increasing to the value of graphite as the sp(2) concentration approaches 100%. By using a combination of the thermally induced bending technique and nanohardness measurements, we extract separately the Young's modulus and Poisson's ratio of the a-C:H films as function of the sp(2) concentration. (C) 2003 American Institute of Physics.

引用

页码：3099 / 3101

页数：3

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