Ultralow biased field emitter using single-wall carbon nanotube directly grown onto silicon tip by thermal chemical vapor deposition

被引:47
作者
Matsumoto, K
Kinosita, S
Gotoh, Y
Uchiyama, T
Manalis, S
Quate, C
机构
[1] Electrotech Lab, Tsukuba, Ibaraki 3058568, Japan
[2] Adv Technol Inst, Chiyoda Ku, Tokyo 101, Japan
[3] MIT, Media Lab, Cambridge, MA 02139 USA
[4] Stanford Univ, Stanford, CA 94305 USA
关键词
D O I
10.1063/1.1343470
中图分类号
O59 [应用物理学];
学科分类号
摘要
A carbon-nanotube field emitter which has single-wall carbon nanotubes with a diameter of 1-2 nm grown directly onto the Si tips by thermal chemical vapor deposition was developed. Owing to the 10-20 times smaller diameter of the nanotube than the conventional silicon (Si) tip, the fabricated carbon-nanotube field emitter showed an ultralow threshold voltage of 10 V for the field emission of electrons, which is more than ten times smaller value than the conventional Si emitter. (C) 2001 American Institute of Physics.
引用
收藏
页码:539 / 540
页数:2
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