A generic multielement microsystem for portable wireless applications

被引:64
作者
Mason, A [1 ]
Yazdi, N [1 ]
Chavan, AV [1 ]
Najafi, K [1 ]
Wise, KD [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ctr Integrated Sensors & Circuits, Ann Arbor, MI 48109 USA
关键词
compensation; measurement system; microelectromechanical devices; microelectromechanical system; microsensor; microsystem; power management; transducer;
D O I
10.1109/5.704279
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An open-architecture microsystem that can be populated with a variety of sensors and actuators is described. The microsystem is designed for low-power wireless applications where small size and high sensor accuracy are important. It consists of an in-module microcontroller connected to multiple front-end transducers through an intramodule sensor bus. An external interface allows internally processed data to be output through either a hard-wired input/output port or a radio-frequency transmitter. The present microsystem is configured for environmental monitoring and measures temperature, barometric pressure, relative humidity, and acceleration/vibration. It occupies less than 10 cc, consumes an average of 530 mu W from 6 V, and transmits data up to 50 m. System features such as active power management, the intramodule sensor bus, generic bus interface circuitry, and in-module sensor compensation based on bivariate polynomials are discussed.
引用
收藏
页码:1733 / 1746
页数:14
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