Simultaneous IR material recognition and conductivity mapping by nanoscale near-field microscopy

被引：77

作者：

Huber, Andreas J.

Kazantsev, Dmitry

Keilmann, Fritz

Wittborn, Jesper

Hillenbrand, Rainer

机构：

[1] Max Planck Inst Biochem, Nano Photon Grp, D-82152 Munich, Germany

[2] Max Planck Inst Biochem, Abt Mol Strukturbiol, D-82152 Munich, Germany

[3] Infineon Technol AG, D-81739 Munich, Germany

来源：

ADVANCED MATERIALS | 2007年 / 19卷 / 17期

关键词：

D O I：

10.1002/adma.200602303

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

IR scattering-type near-field microscopy is applied to simultaneously map material composition and conduction properties in cross-sectional samples of industrial bipolar and metal-oxide-semiconductor devices with nanoscale spatial resolution. Within a single mid-IR image, all relevant materials such as metals, Si, Si3N4, and oxides can be identified by material-specific amplitude and phase contrasts.

引用

页码：2209 / +

页数：5

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