A positive displacement micropump for microdialysis

Miniature fluid pumps, measuring 15 x 4 x 1 mm, have been microfabricated with silicon, glass, and polyimide. Pumps have been tested with deionized water and 10% glycerol solutions as the working solutions. The pumps have been operated with a pneumatic drive or a piezoelectric drive. Flow rates from 0.1 to 110 mu l min(-1) have been achieved. The maximum pressure generated by the pumps was 56 cm of water. Pumps have been operated with a dialysis probe and with a microchannel load. The pump lifetime is limited by the degradation in the performance of the polyimide components in the pump. The power consumption was less than 1 mW at a drive frequency of 10 Hz. (C) 1998 Elsevier Science Ltd. All rights reserved.