Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy

被引:198
作者
Jackman, RJ
Floyd, TM
Ghodssi, R
Schmidt, MA
Jensen, KF
机构
[1] MIT, Dept Chem Engn, Cambridge, MA 02139 USA
[2] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA
关键词
D O I
10.1088/0960-1317/11/3/316
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes a method for fabricating microfluidic devices in a photodefinable epoxy (SU-8). This technique is compatible with, and complementary to, conventional fabrication techniques. It allows microstructures formed in SU-8 to be bonded to produce sealed microfluidic channels. A micromixer fabricated entirely in SU-8, using this technique, for performing liquid-phase reactions is shown to be suitable for visible spectroscopy. This fabrication method also allows the incorporation of materials that are often difficult to integrate. By fabricating hybrid devices that incorporate quartz windows, we demonstrate that these devices are compatible with organic solvents and that in situ ultraviolet detection in a microfluidic system is possible.
引用
收藏
页码:263 / 269
页数:7
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