Novel selective ethanol sensors:: W/TiO2 thin films by sol-gel spin-coating

被引：36

作者：

Garzella, C

Bontempi, E

Depero, LE

Vomiero, A

Della Mea, G

Sberveglieri, G

机构：

[1] INFM, Dept Chem & Phys Engn & Mat, I-25133 Brescia, Italy

[2] INSTM, Struct Chem Lab, Dept Engn Mech, I-25133 Brescia, Italy

[3] Univ Trent, Dept Mat Engn, Ist Nazl Fis Nucl, Natl Lab Legnaro, I-38050 Trent, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 93卷 / 1-3期

关键词：

sol-gel; W/TiO2; ethanol sensor; breath analyzer;

D O I：

10.1016/S0925-4005(03)00192-8

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

TiO2 and W-doped TiO2 thin films have been obtained by a chemically modified sol-gel technique, that implies hydrolysis and condensation of Titanium(VI) ethoxide (TEOT) (and tungsten(V) ethoxide) in the presence of a polymer dissolved in ethanol. Dopant was added in concentration that led to nominal W/Ti atomic ratio of 5/33 and 10/33. Film deposition by spin-coating was per-formed onto allumina substrates. Annealing at 500 degreesC produced nanosized structurally stable oxides films. Structural characterization of these films was made by means of glancing incidence X-ray diffraction (GIXRD). Scanning electron microscopy (SEM) cross-section images were collected and an estimation of the films thickness was obtained. W/Ti atomic ratio was determined by Rutherford back scattering (RBS) analysis. The electrical response towards ethanol and methanol (100-500 ppm) have been tested in the temperature range of 300-500 degreesC. Doping effects on structural and sensing properties were investigated. A comparison with the previous obtained dip-coated W/TiO2 thin films have been reported. (C) 2003 Published by Elsevier Science B.V.

引用

页码：495 / 502

页数：8

共 22 条

[1] Thermal analysis and X-ray diffraction of synthesis of scheelite [J].