Role of Metallic Ni-Cr Dots on the Adhesion, Electrical, Optical and Mechanical Properties of Diamond-like Carbon Thin Films

被引：26

作者：

Dwivedi, Neeraj ^{[1
,2
]}

Kumar, Sushil ^{[1
]}

Rauthan, Chandra Mohan Singh ^{[1
]}

Panwar, Omvir Singh ^{[1
]}

机构：

[1] Natl Phys Lab, Plasma Proc Mat Grp, CSIR, New Delhi 110012, India

[2] Indian Inst Technol Delhi, Dept Phys, New Delhi 110016, India

来源：

PLASMA PROCESSES AND POLYMERS | 2011年 / 8卷 / 02期

关键词：

adhesion; diamond-like carbon (DLC); indentation; PECVD; thin films; HYDROGENATED AMORPHOUS-CARBON; MICROSTRUCTURE; HARDNESS; SURFACE; ENERGY;

D O I：

10.1002/ppap.201000087

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of thermally evaporated metallic Ni-Cr dots on the adhesion, electrical, optical and the mechanical properties of RF-PECVD grown diamond-like carbon (DLC) thin films was investigated. The DLC films deposited over Ni-Cr dots containing substrates exhibited a strong adhesion to the substrate. The observed drastic increase in magnitude of the current and the decrease of optical band gap due to presence of Ni-Cr dots revealed a considerable improvement in their electrical and optical properties, respectively. Further, load versus displacement curves were employed to estimate the hardness (H), elastic modulus (E), plastic resistance parameter (H/E) and elastic recovery (ER). The values of H and E in Ni-Cr dots containing DLC films were found to be comparatively less than that of DLC films. Overall, Ni-Cr metal dots improved adhesion, optical and electrical properties of DLC films with a little deterioration in their mechanical properties (e.g. H, E, ER and H/E).

引用

页码：100 / 107

页数：8

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