Role of Metallic Ni-Cr Dots on the Adhesion, Electrical, Optical and Mechanical Properties of Diamond-like Carbon Thin Films

被引:26
作者
Dwivedi, Neeraj [1 ,2 ]
Kumar, Sushil [1 ]
Rauthan, Chandra Mohan Singh [1 ]
Panwar, Omvir Singh [1 ]
机构
[1] Natl Phys Lab, Plasma Proc Mat Grp, CSIR, New Delhi 110012, India
[2] Indian Inst Technol Delhi, Dept Phys, New Delhi 110016, India
关键词
adhesion; diamond-like carbon (DLC); indentation; PECVD; thin films; HYDROGENATED AMORPHOUS-CARBON; MICROSTRUCTURE; HARDNESS; SURFACE; ENERGY;
D O I
10.1002/ppap.201000087
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effect of thermally evaporated metallic Ni-Cr dots on the adhesion, electrical, optical and the mechanical properties of RF-PECVD grown diamond-like carbon (DLC) thin films was investigated. The DLC films deposited over Ni-Cr dots containing substrates exhibited a strong adhesion to the substrate. The observed drastic increase in magnitude of the current and the decrease of optical band gap due to presence of Ni-Cr dots revealed a considerable improvement in their electrical and optical properties, respectively. Further, load versus displacement curves were employed to estimate the hardness (H), elastic modulus (E), plastic resistance parameter (H/E) and elastic recovery (ER). The values of H and E in Ni-Cr dots containing DLC films were found to be comparatively less than that of DLC films. Overall, Ni-Cr metal dots improved adhesion, optical and electrical properties of DLC films with a little deterioration in their mechanical properties (e.g. H, E, ER and H/E).
引用
收藏
页码:100 / 107
页数:8
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