Tribology of diamond-like carbon films: recent progress and future prospects

被引:998
作者
Erdemir, Ali
Donnet, Christophe
机构
[1] Argonne Natl Lab, Div Energy Technol, Argonne, IL 60439 USA
[2] Univ St Etienne, St Etienne, France
[3] Univ Inst France, Lab Traitement Signal & Instrumentat, UMR 5516, St Etienne, France
关键词
D O I
10.1088/0022-3727/39/18/R01
中图分类号
O59 [应用物理学];
学科分类号
摘要
During the past two decades, diamond-like carbon (DLC) films have attracted an overwhelming interest from both industry and the research community. These films offer a wide range of exceptional physical, mechanical, biomedical and tribological properties that make them scientifically very fascinating and commercially essential for numerous industrial applications. Mechanically, certain DLC films are extremely hard (as hard as 90 GPa) and resilient, while tribologically they provide some of the lowest known friction and wear coefficients. Their optical and electrical properties are also extraordinary and can be tailored to meet the specific requirements of a given application. Because of their excellent chemical inertness, these films are resistant to corrosive and/or oxidative attacks in acidic and saline media. The combination of such a wide range of outstanding properties in one material is rather uncommon, so DLC can be very useful in meeting the multifunctional application needs of advanced mechanical systems. In fact, these films are now used in numerous industrial applications, including razor blades, magnetic hard discs, critical engine parts, mechanical face seals, scratch-resistant glasses, invasive and implantable medical devices and microelectromechanical systems. DLC films are primarily made of carbon atoms that are extracted or derived from carbon-containing sources, such as solid carbon targets and liquid and gaseous forms of hydrocarbons and fullerenes. Depending on the type of carbon source being used during the film deposition, the type of bonds (i.e. sp(1), sp(2), sp(3)) that hold carbon atoms together in DLC may vary a great deal and can affect their mechanical, electrical, optical and tribological properties. Recent systematic studies of DLC films have confirmed that the presence or absence of certain elemental species, such as hydrogen, nitrogen, sulfur, silicon, tungsten, titanium and fluorine, in their microstructure can also play significant roles in their properties. The main goal of this review paper is to highlight the most recent developments in the synthesis, characterization and application of DLC films. We will also discuss the progress made in understanding the fundamental mechanisms that control their very unique friction and wear behaviours. Novel design concepts and the principles of superlubricity in DLC films are also presented.
引用
收藏
页码:R311 / R327
页数:17
相关论文
共 135 条
[1]  
AGREEV VP, 1991, P SOC PHOTO-OPT INS, V1503, P453
[2]  
Alzoubi MF, 2002, LUBR ENG, V58, P21
[3]   Friction of diamond-like carbon films in different atmospheres [J].
Andersson, J ;
Erck, RA ;
Erdemir, A .
WEAR, 2003, 254 (11) :1070-1075
[4]   Frictional behavior of diamondlike carbon films in vacuum and under varying water vapor pressure [J].
Andersson, J ;
Erck, RA ;
Erdemir, A .
SURFACE & COATINGS TECHNOLOGY, 2003, 163 :535-540
[5]   A REVIEW OF RECENT WORK ON HARD I-C FILMS [J].
ANDERSSON, LP .
THIN SOLID FILMS, 1981, 86 (2-3) :193-200
[6]  
Angus J., 1994, SYNTHETIC DIAMOND EM, P21
[7]  
[Anonymous], 1960, Wear, DOI [10.1016/0043-1648(60)90292-1, DOI 10.1016/0043-1648(60)90292-1]
[8]   Tribological properties of segment-structured diamond-like carbon films [J].
Aoki, Y ;
Ohtake, N .
TRIBOLOGY INTERNATIONAL, 2004, 37 (11-12) :941-947
[9]  
ARNOLDUSSEN TC, 1985, ANNU REV MATER SCI, V15, P379
[10]   Tribological characteristics of Si-containing diamond-like carbon films under oil-lubrication [J].
Ban, M ;
Ryoji, M ;
Fujii, S ;
Fujioka, J .
WEAR, 2002, 253 (3-4) :331-338