Spatial distribution of In during the initial stages of growth of InAs on GaAs(001)-c(4x4)

被引:49
作者
Belk, JG
Sudijono, JL
Holmes, DM
McConville, CF
Jones, TS
Joyce, BA
机构
[1] UNIV LONDON IMPERIAL COLL SCI TECHNOL & MED,INTERDISCIPLINARY RES CTR SEMICOND MAT,LONDON SW7 2AB,ENGLAND
[2] UNIV LONDON IMPERIAL COLL SCI TECHNOL & MED,DEPT CHEM,LONDON SW7 2AY,ENGLAND
[3] UNIV WARWICK,DEPT PHYS,COVENTRY CV4 7AL,W MIDLANDS,ENGLAND
基金
英国工程与自然科学研究理事会;
关键词
adsorption kinetics; atom-solid reactions; chemisorption; epitaxy; gallium arsenide; growth; indium arsenide; molecular beam epitaxy; quantum wells; reflection high-energy electron diffraction (RHEED); scanning tunneling microscopy; semiconducting films; semiconducting surfaces; semiconductor-semiconductor interfaces; single crystal surfaces; solid-gas interfaces; surface diffusion; surface structure; morphology; roughness; and topography;
D O I
10.1016/0039-6028(96)00757-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The initial stages in the growth of InAs by molecular beam epitaxy (MBE) on GaAs(001)-c(4x4) have been studied by in situ scanning tunnelling microscopy (STM) and reflection high energy electron diffraction (RHEED). Deposition of 0.1 ML at 420 degrees C gives rise to a low number density of two dimensional (2D) islands on top of domains of locally disordered (1 x 3) structures which decorate the step edges. The size of the (1 x 3) domains increase as more InAs is deposited, consistent with the development of a (1 x 3) RHEED pattern. The results show that a 2D growth mode operates with strong evidence for alloying in the surface layer. The spatial distribution of In in the surface layer has also been investigated by varying the substrate temperature for InAs deposition. The implication is that growth at similar to 420 degrees C provides the optimal condition for growing high quality InAs monolayers on GaAs(001).
引用
收藏
页码:735 / 742
页数:8
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