Modeling of amorphous InGaZnO4 thin film transistors and their subgap density of states

被引:294
作者
Hsieh, Hsing-Hung [1 ,2 ]
Kamiya, Toshio [3 ,4 ]
Nomura, Kenji [4 ]
Hosono, Hideo [1 ,3 ,4 ]
Wu, Chung-Chih [2 ,5 ,6 ]
机构
[1] Tokyo Inst Technol, Frontier Collaborat Res Ctr, Midori Ku, Yokohama, Kanagawa 2268503, Japan
[2] Natl Taiwan Univ, Grad Inst Elect Engn, Taipei 10617, Taiwan
[3] Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
[4] Tokyo Inst Technol, ERATO SORST, Japan Sci & Technol Agcy, Frontier Collaborat Res Ctr,Midori Ku, Yokohama, Kanagawa 2268503, Japan
[5] Natl Taiwan Univ, Grad Inst Photon & Optoelect, Taipei 10617, Taiwan
[6] Natl Taiwan Univ, Dept Elect Engn, Taipei 10617, Taiwan
关键词
D O I
10.1063/1.2857463
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a model of the carrier transport and the subgap density of states in amorphous InGaZnO4 (a-IGZO) for device simulation of a-IGZO thin-film transistors (TFTs) operated in both the depletion mode and the enhancement mode. A simple model using a constant mobility and two-step subgap density of states reproduced well the characteristics of the a-IGZO TFTs. a-IGZO exhibits low densities of tail states and deep gap states, leading to small subthreshold swings and high mobilities. (C) 2008 American Institute of Physics.
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页数:3
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