Visible light emission from SiOx films synthesized by laser ablation

被引：22

作者：

Makimura, T

Kunii, Y

Ono, N

Murakami, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1996年 / 35卷 / 12B期

关键词：

visible light emission; nanometer-sized Si particle; laser ablation; SiOx; photoluminescence; laser plasma soft X-ray absorption spectroscopy;

D O I：

10.1143/JJAP.35.L1703

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a method for synthesizing SiOx films with visible light emission, applying a laser ablation technique. The films were formed by depositing laser-ablated silicon particles in oxygen gas diluted with helium gas. Soft X-ray absorption spectroscopy revealed that the composition of the film is controlled by the total pressure of the gas. Films with particular composition exhibit intense red photoluminescence with a peak below 1.5 eV after annealing in argon gas at 1000 degrees C. In addition to this, most of the films exhibit 2.2-eV photoluminescence after annealing at 500 degrees C. On the basis of these results, the origin of the photoluminescence is discussed.

引用

收藏

页码：L1703 / L1705

页数：3

相关论文

共 20 条

[1] REEVALUATION OF X-RAY ATOMIC ENERGY LEVELS [J].

BEARDEN, JA ;

BURR, AF .

REVIEWS OF MODERN PHYSICS, 1967, 39 (01) :125-&

[2] L2,3 THRESHOLD SPECTRA OF DOPED SILICON AND SILICON-COMPOUNDS [J].

BROWN, FC ;

BACHRACH, RZ ;

SKIBOWSKI, M .

PHYSICAL REVIEW B, 1977, 15 (10) :4781-4788

[3] LUMINESCENT BANDS AND THEIR PROPOSED ORIGINS IN HIGHLY POROUS SILICON [J].

CANHAM, LT .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1995, 190 (01) :9-14

[4] ELECTROLUMINESCENCE STUDIES IN SILICON DIOXIDE FILMS CONTAINING TINY SILICON ISLANDS [J].

DIMARIA, DJ ;

KIRTLEY, JR ;

PAKULIS, EJ ;

DONG, DW ;

KUAN, TS ;

PESAVENTO, FL ;

THEIS, TN ;

CUTRO, JA ;

BRORSON, SD .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (02) :401-416

[5] TERM-VALUES AND VALENCE-RYDBERG MIXING IN CORE-EXCITED STATES - SIH4 AND PH3 [J].

FRIEDRICH, H ;

SONNTAG, B ;

RABE, P ;

BUTSCHER, W ;

SCHWARZ, WHE .

CHEMICAL PHYSICS LETTERS, 1979, 64 (02) :360-366

[6]

GRISCOM DL, 1991, CENTENIAL MEMORIAL I, V99, P923

[7] PHOTOLUMINESCENCE OF SI-RICH SIO2-FILMS - SI CLUSTERS AS LUMINESCENT CENTERS [J].

HAYASHI, S ;

NAGAREDA, T ;

KANZAWA, Y ;

YAMAMOTO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9A) :3840-3845

[8]

KANEMITSU Y, 1995, OPTICAL PROPERTIES L, P258

[9] Dynamics of silicon plume generated by laser ablation and its chemical reaction [J].

Makimura, T ;

Murakami, K .

APPLIED SURFACE SCIENCE, 1996, 96-8 :242-250

[10] Light emission from nanometer-sized silicon particles fabricated by the laser ablation method [J].

Makimura, T ;

Kunii, Y ;

Murakami, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (9A) :4780-4784