Attempt to synthesize carbon nanotubes by hot-wire chemical vapor deposition

被引:13
作者
Yokomichi, H [1 ]
Sakai, F
Ichihara, M
Kishimoto, N
机构
[1] Toyama Prefectural Univ, Dept Elect & Informat, Toyama 9390398, Japan
[2] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan
[3] Natl Res Inst Met, Tsukuba, Ibaraki 3050047, Japan
关键词
carbon nanotubes; hot-wire chemical vapor deposition; scanning electron microscopy;
D O I
10.1016/S0040-6090(01)01266-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Synthesis of carbon nanotubes was attempted by hot-wire chemical vapor deposition using a mixture of C2H2 and NH3 gases. Substrates used were crystalline (c-) Si and amorphous (a-) SiO2 coated with Ni films of 30 nm in thickness as a catalyst for nanotube formation. Scanning electron microscopy (SEM) images showed that micron-sized grains were present in the deposit on the c-Si substrate, whereas nano-sized grains were evident in the deposit on the a-SiO2 substrate. Nanotube formation could not be confirmed by SEM, but there is evidence of the possible formation of nanotubes on the Ni-coated a-SiO2 substrate. (C) 2001 Elsevier Science BN All rights reserved.
引用
收藏
页码:253 / 256
页数:4
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