Electron temperature analysis of two-gas-species inductively coupled plasma

被引：30

作者：

Bai, KH ^{[1
]}

Chang, HY

Uhm, HS

机构：

[1] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea

[2] Ajou Univ, Dept Mol Sci & Technol, Suwon 442749, South Korea

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 11期

关键词：

D O I：

10.1063/1.1404135

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The electron energy distribution functions and electron temperatures are measured in Ar/He and Ar/Xe inductively coupled plasma with various mixing ratios. The electron temperature does not change linearly with the mixing ratios; instead it increases abruptly near P-He/PAr+He=1 and decreases rapidly near P-Xe/PAr+Xe=0. A simple model using a two-ion-species fluid model is suggested to explain the electron temperature variations, and it agrees well with the experimental results. (C) 2001 American Institute of Physics.

引用

页码：1596 / 1598

页数：3

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