Self-assembly of microstage using micro-origami technique on GaAs

被引：19

作者：

Kubota, K ^{[1
]}

Fleischmann, T ^{[1
]}

Saravanan, S ^{[1
]}

Vaccaro, PO ^{[1
]}

Aida, T ^{[1
]}

机构：

[1] ATR, Adapt Commun Res Labs, Kyoto 6190288, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 6B期

关键词：

micromachine; microstage; origami; mountain-fold; valley-fold; epitaxy;

D O I：

10.1143/JJAP.42.4079

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a method for making complex, self-assembling micromachined structures using two types of hinges that bend toward opposite directions, called "tani-ori" (valley-fold) and "yama-ori" (mountain-fold) in origami, the Japanese paper-folding technique. As an example, self-assembled microstages were fabricated. A multilayered structure including InGaAs strained layers was grown by molecular-beam epitaxy on a GaAs substrate. The top and bottom strained layers produce bending forces opposite to each other for "yama-ori" and "tani-ori," respectively. After releasing the multilayered structure from the substrate by the selective etching of a sacrificial layer, the microstage moved into its final position powered by the strain release in the InGaAs layers, where the stage was kept parallel to the substrate owing to the combination of the two types of hinges.

引用

页码：4079 / 4083

页数：5

共 5 条

[1] Microactuators and micromachines [J].