Low temperature synthesis of extremely dense, and vertically aligned single-walled carbon nanotubes

被引：123

作者：

Zhong, GF ^{[1
]}

Iwasaki, T ^{[1
]}

Honda, K ^{[1
]}

Furukawa, Y ^{[1
]}

Ohdomari, I ^{[1
]}

Kawarada, H ^{[1
]}

机构：

[1] Waseda Univ, Sch Sci & Engn, Shinjuku Ku, Tokyo 1698555, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 4A期

关键词：

single-walled carbon nanotubes; vertical alignment; point-arc microwave plasma; chemical vapor deposition; catalyst; low-temperature deposition;

D O I：

10.1143/JJAP.44.1558

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A novel point-arc microwave plasma chemical vapor deposition (CVD) apparatus was employed to grow single-walled carbon nanotubes (SWNTs) on Si substrates coated with a sandwich-like nano-layer structure of 0.7 nm Al2O3 (top)/0.5 nm Fe/ 5-70nm Al2O3 by conventional high frequency sputtering. The growth of extremely dense and vertically aligned SWNTs with an almost constant growth rate of 270 mu m/h within 40 min at a temperature as low as 600 degrees C was demonstrated for the first time. The volume density of the as-grown SWNT films is as higher as 66 kg/m(3).

引用

页码：1558 / 1561

页数：4

共 28 条

[1] Structure-assigned optical spectra of single-walled carbon nanotubes [J].

Bachilo, SM ;

Strano, MS ;

Kittrell, C ;

Hauge, RH ;

Smalley, RE ;

Weisman, RB .

SCIENCE, 2002, 298 (5602) :2361-2366

[2] CATALYTIC GROWTH OF CARBON FILAMENTS [J].

BAKER, RTK .

CARBON, 1989, 27 (03) :315-323

[3] Effect of the growth temperature on the diameter distribution and chirality of single-wall carbon nanotubes [J].

Bandow, S ;

Asaka, S ;

Saito, Y ;

Rao, AM ;

Grigorian, L ;

Richter, E ;

Eklund, PC .

PHYSICAL REVIEW LETTERS, 1998, 80 (17) :3779-3782

[4] COBALT-CATALYZED GROWTH OF CARBON NANOTUBES WITH SINGLE-ATOMIC-LAYERWALLS [J].

BETHUNE, DS ;

KIANG, CH ;

DEVRIES, MS ;

GORMAN, G ;

SAVOY, R ;

VAZQUEZ, J ;

BEYERS, R .

NATURE, 1993, 363 (6430) :605-607

[5] Plasma-induced alignment of carbon nanotubes [J].

Bower, C ;

Zhu, W ;

Jin, SH ;

Zhou, O .

APPLIED PHYSICS LETTERS, 2000, 77 (06) :830-832

[6] Neat macroscopic membranes of aligned carbon nanotubes [J].

Casavant, MJ ;

Walters, DA ;

Schmidt, JJ ;

Smalley, RE .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (04) :2153-2156

[7]

Cassell AM, 1999, J PHYS CHEM B, V103, P6484, DOI 10.1021/jp990957sCCC:$18.00

[8] Aligning single-wall carbon nanotubes with an alternating-current electric field [J].

Chen, XQ ;

Saito, T ;

Yamada, H ;

Matsushige, K .

APPLIED PHYSICS LETTERS, 2001, 78 (23) :3714-3716

[9] Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition [J].

Choi, YC ;

Shin, YM ;

Lee, YH ;

Lee, BS ;

Park, GS ;

Choi, WB ;

Lee, NS ;

Kim, JM .

APPLIED PHYSICS LETTERS, 2000, 76 (17) :2367-2369

[10] Large-scale synthesis of single-wall carbon nanotubes by catalytic chemical vapor deposition (CCVD) method [J].

Colomer, JF ;

Stephan, C ;

Lefrant, S ;

Van Tendeloo, G ;

Willems, I ;

Kónya, Z ;

Fonseca, A ;

Laurent, C ;

Nagy, JB .

CHEMICAL PHYSICS LETTERS, 2000, 317 (1-2) :83-89

← 1 2 3 →