12-GHz Thin-Film Transistors on Transferrable Silicon Nanomembranes for High-Performance Flexible Electronics

被引：143

作者：

Sun, Lei ^{[1
]}

Qin, Guoxuan ^{[1
]}

Seo, Jung-Hun ^{[1
]}

Celler, George K. ^{[2
]}

Zhou, Weidong ^{[3
]}

Ma, Zhenqiang ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA

[2] Soitec USA, Peabody, MA 01960 USA

[3] Univ Texas Arlington, Dept Elect Engn, Arlington, TX 76019 USA

来源：

SMALL | 2010年 / 6卷 / 22期

关键词：

Alignment; flexible electronics; nanomembrane; radio frequency (RF); thin-film transistors (TFT);

D O I：

10.1002/smll.201000522

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Multigigahertz flexible electronics are attractive and have broad applications. A gate-after-source/drain fabrication process using preselectively doped single-crystal silicon nanomembranes (SiNM) is an effective approach to realizing high device speed. However, further downscaling this approach has become difficult in lithography alignment. In this full paper, a local alignment scheme in combination with more accurate SiNM transfer measures for minimizing alignment errors is reported. By realizing 1 mu m channel alignment for the SiNMs on a soft plastic substrate, thin-film transistors with a record speed of 12 GHz maximum oscillation frequency are demonstrated. These results indicate the great potential of properly processed SiNMs for high-performance flexible electronics.

引用

页码：2553 / 2557

页数：5

共 11 条

[1] High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes [J].

Kang, Seong Jun ;

Kocabas, Coskun ;

Ozel, Taner ;

Shim, Moonsub ;

Pimparkar, Ninad ;

Alam, Muhammad A. ;

Rotkin, Slava V. ;

Rogers, John A. .

NATURE NANOTECHNOLOGY, 2007, 2 (04) :230-236

[2] A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates [J].

Khang, DY ;

Jiang, HQ ;

Huang, Y ;

Rogers, JA .

SCIENCE, 2006, 311 (5758) :208-212

[3] Chemically derived, ultrasmooth graphene nanoribbon semiconductors [J].

Li, Xiaolin ;

Wang, Xinran ;

Zhang, Li ;

Lee, Sangwon ;

Dai, Hongjie .

SCIENCE, 2008, 319 (5867) :1229-1232

[4] Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers [J].

Mack, S. ;

Meitl, M. A. ;

Baca, A. J. ;

Zhu, Z. -T. ;

Rogers, J. A. .

APPLIED PHYSICS LETTERS, 2006, 88 (21)

[5] Bendable single crystal silicon thin film transistors formed by printing on plastic substrates [J].

Menard, E ;

Nuzzo, RG ;

Rogers, JA .

APPLIED PHYSICS LETTERS, 2005, 86 (09) :1-3

[6] Macroelectronics: Perspectives on technology and applications [J].

Reuss, RH ;

Chalamala, BR ;

Moussessian, A ;

Kane, MG ;

Kumar, A ;

Zhang, DC ;

Rogers, JA ;

Hatalis, M ;

Temple, D ;

Moddel, G ;

Eliasson, BJ ;

Estes, MJ ;

Kunze, J ;

Handy, ES ;

Harmon, ES ;

Salzman, DB ;

Woodall, JM ;

Alam, MA ;

Murthy, JY ;

Jacobsen, SC ;

Olivier, M ;

Markus, D ;

Campbell, PM ;

Snow, E .

PROCEEDINGS OF THE IEEE, 2005, 93 (07) :1239-1256

[7] High-mobility carbon-nanotube thin-film transistors on a polymeric substrate [J].

Snow, ES ;

Campbell, PM ;

Ancona, MG ;

Novak, JP .

APPLIED PHYSICS LETTERS, 2005, 86 (03) :1-3

[8] Flexible high-frequency microwave inductors and capacitors integrated on a polyethylene terephthalate substrate [J].

Sun, Lei ;

Qin, Guoxuan ;

Huang, Hai ;

Zhou, Han ;

Behdad, Nader ;

Zhou, Weidong ;

Ma, Zhenqiang .

APPLIED PHYSICS LETTERS, 2010, 96 (01)

[9] 7.8-GHz flexible thin-film transistors on a low-temperature plastic substrate [J].

Yuan, Hao-Chih ;

Celler, George K. ;

Ma, Zhenqiang .

JOURNAL OF APPLIED PHYSICS, 2007, 102 (03)

[10] Microwave thin-film transistors using Si nanomembranes on flexible polymer substrate [J].

Yuan, Hao-Chih ;

Ma, Zhenqiang .

APPLIED PHYSICS LETTERS, 2006, 89 (21)

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