On the modes and loss mechanisms of a high Q mechanical oscillator

被引:42
作者
Liu, X [1 ]
Morse, SF
Vignola, JF
Photiadis, DM
Sarkissian, A
Marcus, MH
Houston, BH
机构
[1] SFA Inc, Largo, MD 20774 USA
[2] USN, Res Lab, Washington, DC 20375 USA
关键词
D O I
10.1063/1.1350599
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have performed laser-Doppler vibrometry measurements of the vibration of a double-paddle oscillator. Seven modes with principally out-of-plane motion have been identified. Their resonance frequencies and mode shapes are in excellent agreement with three-dimensional finite element simulations. We have found that the second antisymmetric torsional mode has exceptionally good vibration isolation of its mode shape. This explains its extremely small low temperature internal friction below 10 K (2x10(-8)). By correlating the internal friction of each mode with features of their mode shapes, a criterion has been established to develop high Q oscillators. (C) 2001 American Institute of Physics.
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页码:1346 / 1348
页数:3
相关论文
共 14 条
[1]  
ALLIK H, 1994, SARA 3D USERS MANUAL
[2]   Magnetic field effects on boron-doped Si oscillators [J].
Biggar, RD ;
Parpia, JM .
PHYSICAL REVIEW B, 1997, 56 (21) :13638-13641
[3]  
Braginsky VB, 1985, SYSTEMS SMALL DISSIP
[4]   SINGLE-CRYSTAL SILICON HIGH-Q TORSIONAL OSCILLATORS [J].
KLEIMAN, RN ;
KAMINSKY, GK ;
REPPY, JD ;
PINDAK, R ;
BISHOP, DJ .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (11) :2088-2091
[5]   MECHANICAL LOSS IN FIBERS FOR LOW-NOISE PENDULUMS [J].
KOVALIK, J ;
SAULSON, PR .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (10) :2942-2946
[6]   Low-temperature internal friction in metal films and in plastically deformed bulk aluminum [J].
Liu, X ;
Thompson, EJ ;
White, BE ;
Pohl, RO .
PHYSICAL REVIEW B, 1999, 59 (18) :11767-11776
[7]   Amorphous solid without low energy excitations [J].
Liu, X ;
White, BE ;
Pohl, RO ;
Iwanizcko, E ;
Jones, KM ;
Mahan, AH ;
Nelson, BN ;
Crandall, RS ;
Veprek, S .
PHYSICAL REVIEW LETTERS, 1997, 78 (23) :4418-4421
[8]   Micromachined silicon torsional resonator for magnetic anisotropy measurement [J].
Morillo, J ;
Su, QM ;
Panchapakesan, B ;
Wuttig, M ;
Novotny, D .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (11) :3908-3912
[9]  
NGYEN C, 1997, P IEEE INT S CIRC SY
[10]  
Simmons G., 1971, SINGLE CRYSTAL ELAST