Low-temperature growth and interface characterization of BiFeO3 thin films with reduced leakage current -: art. no. 172901

被引：143

作者：

Lee, YH ^{[1
]}

Wu, JM ^{[1
]}

Chueh, YL ^{[1
]}

Chou, LJ ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 17期

关键词：

D O I：

10.1063/1.2112181

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

BiFeO3 (BFO) thin films of pure perovskite phase were deposited on LaNiO3-buffered Pt/TiOx/SiO2/Si (LNO) and Pt/TiOx/SiO2/Si (Pt) substrates by RF magnetron sputtering. Highly (100)-oriented BFO film was coherently grown on LNO at a temperature as low as 300 degrees C. The crystal structure and the film/electrode interface of BFO films were characterized using x-ray diffraction and scanning transmission electron microscope high-angle annular dark-field imaging. The conventional problem of the leakage current was greatly reduced with remarkable improvement in the film/electrode interface, chemical homogeneity, crystallinity, and surface roughness of the BFO film. (C) 2005 American Institute of Physics.

引用

页码：1 / 3

页数：3

共 26 条

[1] Effect of textured LaNiO3 electrode on the fatigue improvement of Pb(Zr0.53Ti0.47)O-3 thin films [J].

Chen, MS ;

Wu, TB ;

Wu, JM .

APPLIED PHYSICS LETTERS, 1996, 68 (10) :1430-1432

[2]

Hill NA, 2000, J PHYS CHEM B, V104, P6694, DOI [10.1021/jp000114x, 10.1021/jpc00114x]

[3]

Kanai T, 2001, ADV MATER, V13, P487, DOI 10.1002/1521-4095(200104)13:7<487::AID-ADMA487>3.0.CO

[4]

2-L

[5] The low temperature processing for removal of metallic bismuth in ferroelectric SrBi2Ta2O9 thin films [J].

Kim, JS ;

Yang, CH ;

Yoon, SG ;

Choi, WY ;

Kim, HG .

APPLIED SURFACE SCIENCE, 1999, 140 (1-2) :150-155

[6] Structure property relations in BiFeO3/BaTiO3 solid solutions [J].

Kumar, MM ;

Srinivas, A ;

Suryanarayana, SV .

JOURNAL OF APPLIED PHYSICS, 2000, 87 (02) :855-862

[7] Ferroelectricity in a pure BiFeO3 ceramic [J].

Kumar, MM ;

Palkar, VR ;

Srinivas, K ;

Suryanarayana, SV .

APPLIED PHYSICS LETTERS, 2000, 76 (19) :2764-2766

[8] Crystal growth and characterizations of highly oriented BiFeO3 thin films [J].

Lee, YH ;

Liang, CS ;

Wu, JM .

ELECTROCHEMICAL AND SOLID STATE LETTERS, 2005, 8 (11) :F55-F57

[9] Epitaxial growth of LaFeO3 thin films by RF magnetron sputtering [J].

Lee, YH ;

Wu, JM .

JOURNAL OF CRYSTAL GROWTH, 2004, 263 (1-4) :436-441

[10] Ferroelectric BaPbO3/PbZr0.53Ti0.47/BaPbO3 heterostructures [J].

Liang, CS ;

Wu, JM ;

Chang, MC .

APPLIED PHYSICS LETTERS, 2002, 81 (19) :3624-3626

← 1 2 3 →