Ferroelectric BaPbO3/PbZr0.53Ti0.47/BaPbO3 heterostructures

被引：48

作者：

Liang, CS ^{[1
]}

Wu, JM ^{[1
]}

Chang, MC ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2002年 / 81卷 / 19期

关键词：

D O I：

10.1063/1.1520332

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

BaPbO3 (BPO)/PbZr0.53Ti0.47 (PZT)/BPO heterostructures were fabricated by combining the sol-gel and rf-magnetron sputtering techniques. Experimental results indicate that the BPO bottom electrodes effectively prevent the formation of the rosette structure of PZT, producing smooth surfaces. Additionally, ferroelectric, fatigue, and leakage current properties were markedly improved when both the top and the bottom electrodes were changed from Pt to BPO. These improvements are due to a superior electrode/ferroelectric interface. BPO is better than Pt and other oxide electrodes for use in PZT ferroelectric capacitors due to its remarkably improved properties and quite low growth temperature. (C) 2002 American Institute of Physics.

引用

页码：3624 / 3626

页数：3

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