Fermi-level stabilization energy in group III nitrides

被引:198
作者
Li, SX [1 ]
Yu, KM
Wu, J
Jones, RE
Walukiewicz, W
Ager, JW
Shan, W
Haller, EE
Lu, H
Schaff, WJ
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Div Mat Sci, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA
[3] Cornell Univ, Dept Elect & Comp Engn, Ithaca, NY 14853 USA
关键词
D O I
10.1103/PhysRevB.71.161201
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Energetic particle irradiation is used to systematically introduce point defects into In1-xGaxN alloys over the entire composition range. Three types of energetic particles (electrons, protons, and He-4(+)) are used to produce a displacement damage dose spanning five decades. In InN and In-rich InGaN the free electron concentration increases with increasing irradiation dose but saturates at a sufficiently high dose. The saturation is due to Fermi level pinning at the Fermi stabilization energy (E-FS), which is located at 4.9 eV below the vacuum level. Electrochemical capacitance-voltage (ECV) measurements show that the pinning of the surface Fermi energy at E-FS is also responsible for the surface electron accumulation in as-grown InN and In-rich InGaN alloys. The results are in agreement with the amphoteric defect model that predicts that the same type of native defects are responsible for the Fermi level pinning in both cases.
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页数:4
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