Electric field induced second harmonic generation spectroscopy on a metal-oxide-silicon structure

被引:73
作者
Godefroy, P [1 ]
deJong, W [1 ]
vanHasselt, CW [1 ]
Devillers, MAC [1 ]
Rasing, T [1 ]
机构
[1] CATHOLIC UNIV NIJMEGEN,MAT RES INST,6525 ED NIJMEGEN,NETHERLANDS
关键词
D O I
10.1063/1.115646
中图分类号
O59 [应用物理学];
学科分类号
摘要
Spectroscopic electric-field-induced second harmonic generation on a Si(lll)-SiO2-Cr metal-oxide-silicon structure shows a bias-independent ''interface'' resonance gt 3.25 eV and a ''bulk'' resonance at 3.43 eV which is strongly bias dependent. The symmetry forbidden bulk dipole contribution becomes observable, and even dominating, due to the bias-induced band-bending that breaks the bulk inversion symmetry. The origin of these resonances is discussed, as well as the prospects for using second harmonic generation as a probe of metal-oxide-silicon characteristics. (C) 1996 American Institute of Physics.
引用
收藏
页码:1981 / 1983
页数:3
相关论文
共 29 条
[1]  
AKTSIPETROV OA, 1986, ZH EKSP TEOR FIZ, V64, P167
[2]  
AKTSIPETROV OA, 1994, OPT LETT, V19, P1
[3]   2ND-HARMONIC GENERATION IN SI-SIO2 HETEROSTRUCTURES FORMED BY CHEMICAL, THERMAL, AND PLASMA-ASSISTED OXIDATION AND DEPOSITION PROCESSES [J].
BJORKMAN, CH ;
SHEARON, CE ;
MA, Y ;
YASUDA, T ;
LUCOVSKY, G ;
EMMERICHS, U ;
MEYER, C ;
LEO, K ;
KURZ, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :964-970
[4]   INFLUENCE OF SURFACE-ROUGHNESS ON THE ELECTRICAL-PROPERTIES OF SI-SIO2 INTERFACES AND ON 2ND-HARMONIC GENERATION AT THESE INTERFACES [J].
BJORKMAN, CH ;
YASUDA, T ;
SHEARON, CE ;
MA, Y ;
LUCOVSKY, G ;
EMMERICHS, U ;
MEYER, C ;
LEO, K ;
KURZ, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (04) :1521-1527
[5]  
BJORKMAN CH, 1992, PHYSICS CHEM SIO2 SI, V2
[6]   IDENTIFICATION OF STRAINED SILICON LAYERS AT SI-SIO2 INTERFACES AND CLEAN SI SURFACES BY NONLINEAR-OPTICAL SPECTROSCOPY [J].
DAUM, W ;
KRAUSE, HJ ;
REICHEL, U ;
IBACH, H .
PHYSICAL REVIEW LETTERS, 1993, 71 (08) :1234-1237
[7]   NONLINEAR-OPTICAL SPECTROSCOPY AT SILICON INTERFACES [J].
DAUM, W ;
KRAUSE, HJ ;
REICHEL, U ;
IBACH, H .
PHYSICA SCRIPTA, 1993, T49B :513-518
[8]   ELECTROREFLECTANCE AND ELLIPSOMETRY OF SILICON FROM 3 TO 6 EV [J].
DAUNOIS, A ;
ASPNES, DE .
PHYSICAL REVIEW B, 1978, 18 (04) :1824-1839
[9]   INTRINSIC STRESS AND STRESS GRADIENTS AT THE SIO2/SI INTERFACE IN STRUCTURES PREPARED BY THERMAL-OXIDATION OF SI AND SUBJECTED TO RAPID THERMAL ANNEALING [J].
FITCH, JT ;
BJORKMAN, CH ;
LUCOVSKY, G ;
POLLAK, FH ;
YIN, X .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04) :775-781
[10]   LASER NONLINEAR-OPTICAL PROBING OF SILICON/SIO2 INTERFACES - SURFACE STRESS FORMATION AND RELAXATION [J].
GOVORKOV, SV ;
KOROTEEV, NI ;
PETROV, GI ;
SHUMAY, IL ;
YAKOVLEV, VV .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 50 (04) :439-443