High-performance carbon nanotube network transistors for logic applications

被引:6
作者
Chiu, Po-Wen [1 ]
Chen, Chien-Hua [1 ]
机构
[1] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 30013, Taiwan
关键词
D O I
10.1063/1.2844889
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the fabrication of carbon nanotube network field effect transistors, in which a submonolayer network is selectively and uniformly dispersed in the active region with individually addressable back gate. The high current on/off ratio (10(4)) and good device-to-device uniformity were achieved by selective burnout of metallic pathways. The enhanced capacitive coupling between the gate and nanotube network reduces the subthreshold slope down to 180 mV/dec. The effective local gating allows us to implement logic circuits, such as an inverter and the two most important universal NOR and NAND gates. (C) American Institute of Physics.
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页数:3
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