Defining the measurand in radius of curvature measurements

被引:9
作者
Davies, A [1 ]
Schmitz, TL [1 ]
机构
[1] Univ N Carolina, Dept Phys & Opt Sci, Charlotte, NC 28223 USA
来源
RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS II | 2003年 / 5190卷
关键词
radius of curvature; calibration; interferometry; homogeneous transformation matrix; traceability;
D O I
10.1117/12.504884
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Traceable radius of curvature measurements are critical for precision optics manufacturing. An optical bench measurement of radius is very repeatable and is the preferred method for low-uncertainty applications. On an optical bench, the displacement of the optic is measured as it is moved between the cat's eye and confocal positions, each identified using a figure measuring interferometer. This distance is nominally the radius of curvature. Traceability requires connection to a basic unit (the meter, here) in addition to a defensible uncertainty analysis. The identification and proper propagation of all uncertainty sources in this measurement is challenging. In this paper we report on a new mathematical definition of the radius measurand that is a single function that depends on all uncertainty sources, such as error motions, alignment uncertainty, displacement gauge uncertainty, etc. The method is based on a homogeneous transformation matrix (HTM) formalism, intrinsically defines an unbiased estimate for radius, and provides a single mathematical expression for uncertainty propagation through a Taylor-series expansion.
引用
收藏
页码:134 / 145
页数:12
相关论文
共 12 条
[1]  
*ARFK, 1970, MATH METH PHYS
[2]  
Bevington P., 2002, Data Reduction and Error Analysis for the Physical Sciences, V3rd ed.
[3]  
Daniel M., 2006, Optical Shop Testing
[4]  
*INT ORG STAND ISO, 1995, GUID EXPR UNC MEAS
[5]  
KARODKAR D, IN PRESS P SPIE
[6]   MEASUREMENT OF LONG RADIUS OF CURVATURE [J].
MURTY, MVRK ;
SHUKLA, RP .
OPTICAL ENGINEERING, 1983, 22 (02) :231-235
[7]  
SCHMITZ T, 2000, P ASPE SPRING TOP M, P27
[8]   Uncertainties in interferometric measurements of radius of curvature [J].
Schmitz, TL ;
Davies, AD ;
Evans, CJ .
OPTICAL MANUFACTURING AND TESTING IV, 2001, 4451 :432-447
[9]   Displacement uncertainty in interferometric radius measurements [J].
Schmitz, TL ;
Evans, CJ ;
Davies, A ;
Estler, WT .
CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2002, 51 (01) :451-454
[10]   RADIUS MEASUREMENT BY INTERFEROMETRY [J].
SELBERG, LA .
OPTICAL ENGINEERING, 1992, 31 (09) :1961-1966